Title:
SUBSTRATE FILM FORMING MACHINE TABLE AND USAGE METHOD
Document Type and Number:
WIPO Patent Application WO/2019/165749
Kind Code:
A1
Abstract:
A substrate film forming machine table and a usage method. The substrate film forming machine table comprises: a first substrate bearing inlet and outlet chamber (11); a second substrate bearing inlet and outlet chamber (12); a film forming chamber (13); an intermediate chamber (14); a pump set (21) connected to the first substrate bearing inlet and outlet chamber (11); a second pump (22) connected to the intermediate chamber (14); a third pump (23) connected to the film forming chamber (13) and the second substrate bearing inlet and outlet chamber (12); at least one backup pump (24), which is provided to connect to the film forming chamber (13) and the second substrate bearing inlet and outlet chamber (12) so as to extract air from the film forming chamber (13) and the second substrate bearing inlet and outlet chamber (12) when the third pump (23) is damaged; or, connecting to the intermediate chamber (14) so as to extract air from the intermediate chamber (14) when the second pump (22) is damaged.
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Inventors:
CHU CHENGLIANG (CN)
Application Number:
PCT/CN2018/096285
Publication Date:
September 06, 2019
Filing Date:
July 19, 2018
Export Citation:
Assignee:
HKC CORP LTD (CN)
CHONGQING HKC OPTOELECTRONICS TECH CO LTD (CN)
CHONGQING HKC OPTOELECTRONICS TECH CO LTD (CN)
International Classes:
C23C14/54; C23C14/56
Foreign References:
| CN107142464A | 2017-09-08 | |||
| CN105552001A | 2016-05-04 | |||
| JP2006183152A | 2006-07-13 |
Attorney, Agent or Firm:
BEYOND ATTORNEYS AT LAW (CN)
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