Title:
SUBSTRATE GRIPPING HAND AND SUBSTRATE TRANSPORT DEVICE
Document Type and Number:
WIPO Patent Application WO/2017/145986
Kind Code:
A1
Abstract:
A substrate gripping hand is provided with: a base plate wherein a center line and gripping position are prescribed; at least one fixed claw capable of mating with an edge of a substrate in the gripping position and provided at a tip end side of the base plate; a movable claw having an acting part that can act on an edge of the substrate in the gripping position and movable back-and-forth on the center line more to the base end side than the gripping position; a pusher having an acting part that can act on an edge lower than the center of the substrate in a perpendicular orientation and movable back-and-forth parallel with the center line more to the base end side than the gripping position; and an actuator for moving the movable claw and pusher back-and-forth as a unit. The pusher acting part is positioned more to the tip end side than the acting part of the movable claw such that the substrate is grasped by joint operation of the forward moving movable claw and the fixed claw after the substrate is brought to the gripping position by the pusher moving forward toward the tip end side.
Inventors:
FUKUSHIMA TAKAYUKI
Application Number:
PCT/JP2017/006137
Publication Date:
August 31, 2017
Filing Date:
February 20, 2017
Export Citation:
Assignee:
KAWASAKI HEAVY IND LTD (JP)
International Classes:
B25J15/08; H01L21/677; B65G49/07
Foreign References:
| JP2000260858A | 2000-09-22 | |||
| JP2001093968A | 2001-04-06 | |||
| JPH10209243A | 1998-08-07 |
Attorney, Agent or Firm:
PATENT CORPORATE BODY ARCO PATENT OFFICE (JP)
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