SUBSTRATE FOR GROWTH OF CARBON NANOTUBE, METHOD FOR GROWTH OF CARBON NANOTUBE, METHOD FOR CONTROL OF PATICLE DIAMETER OF CATALYST FOR GROWTH OF CARBON NANOTUBE, AND METHOD FOR CONTROL CARBON NANOTUBE DIAMETER

Title:

Document Type and Number:

WIPO Patent Application WO/2007/139086

Kind Code:

A1

Abstract:

A substrate for the growth of a carbon nanotube having a catalyst layer microparticulated by using an arc plasma gun. CNT is grown on the catalyst layer by thermal CVD or remote plasma CVD. The particle diameter of the catalyst for the growth of CNT is regulated by the number of shots of the arc plasma gun. CNT is grown on the catalyst layer having a regulated catalyst particle diameter by thermal CVD or remote plasma CVD to regulate the inner diameter or outer diameter of CNT.

Inventors:

NAKANO, Haruhisa (Inc. Tsukuba Institute for Super Materials, 5-9-6 Tokodai, Tsukuba-sh, Ibaraki 35, 3002635, JP)
中野美尚 (〒35 茨城県つくば市東光台５－９－６株式会社アルバック筑波超材料研究所内 Ibaraki, 3002635, JP)
YAMAZAKI, Takahisa (Inc. Tsukuba Institute for Super Materials, 5-9-6 Tokodai, Tsukuba-sh, Ibaraki 35, 3002635, JP)

Application Number:

JP2007/060859

Publication Date:

December 06, 2007

Filing Date:

May 29, 2007

Export Citation:

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Assignee:

ULVAC, INC. (2500, Hagisono Chigasaki-sh, Kanagawa 43, 2538543, JP)
株式会社アルバック (〒43 神奈川県茅ヶ崎市萩園２５００番地 Kanagawa, 2538543, JP)
NAKANO, Haruhisa (Inc. Tsukuba Institute for Super Materials, 5-9-6 Tokodai, Tsukuba-sh, Ibaraki 35, 3002635, JP)
中野美尚 (〒35 茨城県つくば市東光台５－９－６株式会社アルバック筑波超材料研究所内 Ibaraki, 3002635, JP)

International Classes:

C01B31/02; B01J23/755; B01J33/00; C23C14/24

Attorney, Agent or Firm:

EXEO Patent & Trademark Company (2nd Fl, Ebisu Lite Bldg.1-19, Ebisuminami 3-chom, Shibuya-ku Tokyo 22, 1050022, JP)

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