Title:
SUBSTRATE HEATING DEVICE
Document Type and Number:
WIPO Patent Application WO/2015/156530
Kind Code:
A1
Abstract:
A substrate heating device is described. The substrate heating device comprises: a hot plate; a table for supporting the hot plate; a plurality of support units for supporting the hot plate on the table, the support units being installed at the peripheral parts of the center of the hot plate to guide the thermal expansion of the hot plate in a radial direction.
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Inventors:
LEE SAE BOM (KR)
JUNG DONG JOON (KR)
JUNG DONG JOON (KR)
Application Number:
PCT/KR2015/003132
Publication Date:
October 15, 2015
Filing Date:
March 31, 2015
Export Citation:
Assignee:
JOEUN TECHNOLOGY CO LTD (KR)
LEE SAE BOM (KR)
LEE SAE BOM (KR)
International Classes:
H01L21/324; H01L21/683
Foreign References:
| KR20130010557A | 2013-01-29 | |||
| KR20110030049A | 2011-03-23 | |||
| KR20010112685A | 2001-12-21 | |||
| US20120160419A1 | 2012-06-28 | |||
| KR20130131045A | 2013-12-03 |
Attorney, Agent or Firm:
Y.P.LEE, MOCK & PARTNERS (KR)
리앤목 특허법인 (KR)
리앤목 특허법인 (KR)
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