SUBSTRATE HEATING FURNACE

WIPO Patent Application WO/2012/011397

A1

Disclosed is a substrate heating furnace that can heat a plurality of substrates simultaneously while cooling a furnace core pipe. The furnace core pipe (11) is formed from ceramic that transmits infrared rays. Infrared rays from a lamp heating heater (15) positioned between the furnace core pipe (11) and a reflector (14) are radiated on to and heat the substrates (12), which are held by substrate holding sections (13) and face the opposite surface to the inner peripheral side surface of the furnace core pipe (11). The reflector (14) is arranged at a position away from the outer peripheral side surface of the furnace core pipe (11) and surrounding the outer peripheral side surface of the furnace core pipe (11). Air and other fluid that transmits infrared rays are blown along a flow path (19) between the furnace core pipe (11) and the reflector (14) and cool the furnace core pipe (11).

SUZUKI, Yasumasa (INC. 2500, Hagisono, Chigasaki-sh, Kanagawa 43, 〒2538543, JP)
鈴木　康正 (〒43 神奈川県茅ヶ崎市萩園２５００　株式会社アルバック内 Kanagawa, 〒2538543, JP)
SHIMIZU, Saburo (INC. 2500, Hagisono, Chigasaki-sh, Kanagawa 43, 〒2538543, JP)

JP2011/065705

January 26, 2012

July 08, 2011

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ULVAC, INC. (2500, Hagisono Chigasaki-sh, Kanagawa 43, 〒2538543, JP)
株式会社アルバック (〒43 神奈川県茅ヶ崎市萩園２５００ Kanagawa, 〒2538543, JP)
SUZUKI, Yasumasa (INC. 2500, Hagisono, Chigasaki-sh, Kanagawa 43, 〒2538543, JP)
鈴木　康正 (〒43 神奈川県茅ヶ崎市萩園２５００　株式会社アルバック内 Kanagawa, 〒2538543, JP)

H01L21/31

ISHIJIMA, Shigeo et al. (Toranomonkougyou Bldg, 3F 1-2-18, Toranomon, Minato-k, Tokyo 01, 〒1050001, JP)

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