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Patent Searching and Data


Title:
SUBSTRATE-HOLDING CONTAINER
Document Type and Number:
WIPO Patent Application WO/2019/012926
Kind Code:
A1
Abstract:
In the present invention, a valve body (40) mounted to a substrate-holding container has: a first cylinder section (410) which has one end in communication with the outside of a container body (10) and which is formed on a stationary cylinder (41); a second cylinder section (430) which has one end in communication with the inside of the container body (10), is provided spaced from the other end of the first cylinder section (410), and is formed on an inner cover cylinder (43); a plug section (431) located between the other end of the first cylinder section (410) and the other end of the second cylinder section (430); and an elastic body (44) at least covering the plug section (431) and having an inner diameter equal to or smaller than the outer diameter of the plug section (431). The plug section (431) and the elastic body (44) come in close contact with each other to regulate the flow of gas relative to the container body (10). Thus, the provided substrate-holding container comprises the valve body capable of regulating a gas flow without using a metallic member.

Inventors:
OGAWA Osamu (406-1, Yoshino-cho 1-chome, Kita-ku, Saitama-sh, Saitama 11, 〒3310811, JP)
Application Number:
JP2018/023312
Publication Date:
January 17, 2019
Filing Date:
June 19, 2018
Export Citation:
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Assignee:
SHIN-ETSU POLYMER CO.,LTD. (9 Kandasuda-cho 1chome, Chiyoda-ku Tokyo, 41, 〒1010041, JP)
International Classes:
H01L21/673; B65D85/30; B65D85/86; F16K24/00
Foreign References:
JP2009277687A2009-11-26
US3298391A1967-01-17
US20040045605A12004-03-11
Attorney, Agent or Firm:
SAKAMOTO Tomohiro (2-13, Yotsuya Shinjuku-ku Tokyo, 04, 〒1600004, JP)
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