Title:
SUBSTRATE HOLDING DEVICE
Document Type and Number:
WIPO Patent Application WO/2016/203561
Kind Code:
A1
Abstract:
A substrate holding device 24 is provided with: a table 84 disposed below a substrate S; a lift mechanism 86 for lifting the table; supporting columns 126, each of which stands on the table, and has an upper end portion capable of being displaced in the vertical direction with respect to the table; elastic bodies 130 that apply a pressing force to the supporting columns, said pressing force being in the direction in which the upper end portions of the supporting columns are displaced upward; and a pair of stoppers 140 for locking both end portions of the substrate from above, said both end portions being in the width direction of the substrate. The substrate holding device brings up the substrate via the supporting columns by lifting the table, and locks both the end portions of the substrate to the pair of stoppers in a state wherein the upper end portions of the supporting columns are displaced downward against the pressing force of the elastic bodies, thereby applying to the substrate a holding force corresponding to the pressing force of the elastic bodies, and holding the substrate. The substrate holding device is configured such that the holding force to be applied to the substrate can be discretionary changed by controlling the lifting position of the table. The substrate can be held with a suitable holding force corresponding to the substrate.
Inventors:
TAKAGI TAKANORI (JP)
Application Number:
PCT/JP2015/067402
Publication Date:
December 22, 2016
Filing Date:
June 17, 2015
Export Citation:
Assignee:
FUJI MACHINE MFG (JP)
International Classes:
H05K13/04
Domestic Patent References:
| WO2014170993A1 | 2014-10-23 |
Foreign References:
| JP2006351891A | 2006-12-28 | |||
| JP2006186077A | 2006-07-13 | |||
| JP2008311401A | 2008-12-25 |
Attorney, Agent or Firm:
CHUBU PATENT OFFICE (JP)
Central patent business corporation international patent firm (JP)
Central patent business corporation international patent firm (JP)
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