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Title:
SUBSTRATE INSPECTING APPARATUS
Document Type and Number:
WIPO Patent Application WO/2008/035752
Kind Code:
A1
Abstract:
Provided is a substrate inspecting apparatus, which can be easily transported by a vehicle even when a substrate is increased in size, is easily assembled at a transported site, and reduces transportation cost. The substrate inspecting apparatus is provided with an inspection head for inspecting an inspection line orthogonally intersecting with a substrate transfer direction; an inspection unit wherein an inspection floating stage section for floating a gantry for supporting the inspection head and the substrate to a fixed height is integrated with an inspection base; and a transfer unit, which is removably assembled to the inspection base between the leg section of the gantry and the inspection floating stage section, is arranged along one side end of a transfer path for transferring the substrate, in T-shape to the inspection unit, and holds the substrate to shift it in a transfer direction. The substrate inspecting apparatus can be transported by a vehicle by being disassembled into the transfer unit and the inspection unit.

Inventors:
JOGASAKI SHUYA (JP)
Application Number:
PCT/JP2007/068333
Publication Date:
March 27, 2008
Filing Date:
September 21, 2007
Export Citation:
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Assignee:
OLYMPUS CORP (JP)
JOGASAKI SHUYA (JP)
International Classes:
G01N21/89; G01N21/958
Foreign References:
JP2006242679A2006-09-14
JP2006188313A2006-07-20
JP2000009661A2000-01-14
JP2004238133A2004-08-26
JP2005062819A2005-03-10
JP2004279335A2004-10-07
JPH0831550A1996-02-02
JPH09301510A1997-11-25
Attorney, Agent or Firm:
UEDA, Kunio et al. (3-1 Minatomirai 3-chome,Nishi-ku, Yokohama-shi, Kanagawa 12, JP)
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