Title:
SUBSTRATE INSPECTION DEVICE AND SUBSTRATE INSPECTION METHOD
Document Type and Number:
WIPO Patent Application WO/2019/132528
Kind Code:
A1
Abstract:
The present invention relates to a substrate inspection device and a substrate inspection method and, more specifically, to a substrate inspection device and a substrate inspection method, which monitor a substrate so as to determine a processing state thereof, and inspect whether an abnormality exists. The substrate inspection device according to one embodiment of the present invention comprises: a substrate loading unit for loading a substrate thereon; a measuring unit for monitoring the substrate by moving relatively with respect to the substrate; a control unit for controlling a moving route of the measuring unit such that at least partial areas are monitored at positions different from each other with respect to a plurality of substrates; and an analysis unit for determining whether an abnormality exists from the monitoring information of the plurality of substrates.
Inventors:
JUNG GU HYUN (KR)
KIM YOUNG ROK (KR)
OH SE YONG (KR)
HWANG CHUL JOO (KR)
JUNG JIN AN (KR)
KIM YOUNG ROK (KR)
OH SE YONG (KR)
HWANG CHUL JOO (KR)
JUNG JIN AN (KR)
Application Number:
PCT/KR2018/016696
Publication Date:
July 04, 2019
Filing Date:
December 27, 2018
Export Citation:
Assignee:
JUSUNG ENG CO LTD (KR)
International Classes:
H01L21/66; H01L21/67
Foreign References:
| US20050200841A1 | 2005-09-15 | |||
| KR20120133589A | 2012-12-11 | |||
| KR20160028954A | 2016-03-14 | |||
| JP2016076611A | 2016-05-12 | |||
| KR20160116534A | 2016-10-10 |
Attorney, Agent or Firm:
NAM, Seung-Hee (KR)
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