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Title:
SUBSTRATE INSPECTION DEVICE, SUBSTRATE PROCESSING DEVICE, SUBSTRATE INSPECTION METHOD, AND SUBSTRATE PROCESSING METHOD
Document Type and Number:
WIPO Patent Application WO/2019/058772
Kind Code:
A1
Abstract:
In the present invention, actual image data expressing an image of one surface of a substrate is generated. A plurality of unit areas aligned along a first diameter direction of the substrate are set on an image that is based on the actual image data. For each of the plurality of unit areas, the average value of the plurality of pixels composing the unit area is calculated as an average pixel value. The average pixel values of the plurality of unit areas are smoothed. The differences between the average pixel value of a predetermined unit area after smoothing and the average pixel values of each unit area after smoothing are calculated. Image data for display is generated by, for each unit area, adding the difference corresponding to the unit area to each of the pixel values in a band-like area extending from the unit area in parallel to a second diameter direction orthogonal to the first diameter direction.

Inventors:
MATSUO TOMOHIRO (JP)
NAKAGAWA KOJI (JP)
Application Number:
PCT/JP2018/028749
Publication Date:
March 28, 2019
Filing Date:
July 31, 2018
Export Citation:
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Assignee:
SCREEN HOLDINGS CO LTD (JP)
International Classes:
G01N21/956; G01B11/30; G06T1/00; G06T5/00; H01L21/66
Foreign References:
JPH11257937A1999-09-24
JP2002148196A2002-05-22
JP2014157024A2014-08-28
JP2013213676A2013-10-17
JP2001524205A2001-11-27
JP2013502562A2013-01-24
JP2001209798A2001-08-03
JPH10221040A1998-08-21
JP2015127653A2015-07-09
JP2017220497A2017-12-14
Attorney, Agent or Firm:
FUKUSHIMA, Yoshito (JP)
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