Title:
SUBSTRATE INSPECTION DEVICE, SUBSTRATE TREATMENT DEVICE, SUBSTRATE INSPECTION METHOD, AND SUBSTRATE TREATMENT METHOD
Document Type and Number:
WIPO Patent Application WO/2018/042743
Kind Code:
A1
Abstract:
A substrate W is held by a rotating holding unit (252) such that the substrate can rotate. First image data indicating an image of the substrate is generated by picking up, at the time of performing first image pickup, the image of the substrate by means of an image pickup unit (1), said substrate being held by the rotating holding unit. After performing the first image pickup, the substrate is rotated by a predetermined angle by means of the rotating holding unit. Second image data indicating an image of the substrate is generated by picking up, at the time of performing second image pickup after rotating the substrate, the image of the substrate by means of the image pickup unit, said substrate being held by the rotating holding unit. On the basis of the first and second image data, whether there is a defective in the surface state of the substrate is determined.
Inventors:
KASHIYAMA MASAHITO (JP)
PIECZULEWSKI CHARLES (JP)
MORITA AKIHIKO (JP)
MATSUO TOMOHIRO (JP)
PIECZULEWSKI CHARLES (JP)
MORITA AKIHIKO (JP)
MATSUO TOMOHIRO (JP)
Application Number:
PCT/JP2017/013870
Publication Date:
March 08, 2018
Filing Date:
April 03, 2017
Export Citation:
Assignee:
SCREEN HOLDINGS CO LTD (JP)
International Classes:
H01L21/027; G01N21/956; H01L21/66
Foreign References:
| JP2014190797A | 2014-10-06 | |||
| JP2012194059A | 2012-10-11 | |||
| JP2010034133A | 2010-02-12 | |||
| JP2014115140A | 2014-06-26 | |||
| JP2016212008A | 2016-12-15 |
Attorney, Agent or Firm:
FUKUSHIMA, Yoshito (JP)
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