SUBSTRATE INSPECTION AND REPAIR DEVICE, AND SUBSTRATE EVALUATION SYSTEM

WIPO Patent Application WO/2008/015738

A1

An inspection and repair device is provided with an inspecting unit for inspecting a defect of a substrate on which a TFT array is formed and a repairing unit for repairing a defective array, wherein the inspecting unit and the repairing unit are configured to carry out the defective inspection and the repair of the defect in the same chamber, respectively. With this structure, processes for movements of the substrate are simplified and data transmitting and receiving processes between the device and a central system server are also simplified. For further details, a first inspecting unit outputs pixel coordinates data of a defect portion and defect category data of the defect portion and the repairing unit repairs the detect portion in accordance with the pixel coordinates data of the defect portion and the defect category data detected by the first inspecting unit. A second inspecting unit inspects a driving state of every pixel unit of the TFT array on the substrate, outputs TFT array driving state data, and reinspects a state after the repair.

NAKATANI ATSUO (JP)
SHINOHARA MAKOTO (JP)
KURODA SHIN-ICHI (JP)
IMAI DAISUKE (JP)

PCT/JP2006/315220

February 07, 2008

August 01, 2006

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SHIMADZU CORP (JP)
NAKATANI ATSUO (JP)
SHINOHARA MAKOTO (JP)
KURODA SHIN-ICHI (JP)
IMAI DAISUKE (JP)

H01L27/12; G01N21/88; G01N23/225; G02F1/13; G02F1/1368; G09F9/00; H01L21/3205; H01L21/66; H01L23/52; H01L29/786

JPH07201946A	1995-08-04
JPH09146116A	1997-06-06
JPH0682801A	1994-03-25
JPH11330186A	1999-11-30

SHIONOIRI, Akio (1-4 Kugenuma-Tachibana 1-chom, Fujisawa-shi Kanagawa 24, JP)

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