Title:
SUBSTRATE AND LIGHT-EMITTING ELEMENT
Document Type and Number:
WIPO Patent Application WO/2019/049653
Kind Code:
A1
Abstract:
This substrate 10 comprises a first layer L1 containing crystalline aluminum nitride, a second layer L2 containing crystalline α-alumina, and an intermediate layer Lm interposed between the first layer L1 and the second layer L2 and containing aluminum, nitrogen, and oxygen, wherein the nitrogen content of the intermediate layer Lm decreases from the first layer L1 toward the second layer L2 in direction Z, and the oxygen content of the intermediate layer Lm increases from the first layer L1 toward the second layer L2 in direction Z.
Inventors:
OHIDO ATSUSHI (JP)
YAMASAWA KAZUHITO (JP)
KAWASAKI KATSUMI (JP)
YAMASAWA KAZUHITO (JP)
KAWASAKI KATSUMI (JP)
Application Number:
PCT/JP2018/030857
Publication Date:
March 14, 2019
Filing Date:
August 21, 2018
Export Citation:
Assignee:
TDK CORP (JP)
International Classes:
C30B29/20; C30B33/02; H01L21/318; H01L21/86; H01L33/16; H01L33/32
Domestic Patent References:
| WO2005015618A1 | 2005-02-17 | |||
| WO2016024514A1 | 2016-02-18 | |||
| WO2017145810A1 | 2017-08-31 |
Foreign References:
| JP2005104829A | 2005-04-21 |
Attorney, Agent or Firm:
HASEGAWA Yoshiki et al. (JP)
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