Title:
SUBSTRATE AND METHOD FOR PRODUCING FILM SUBSTRATE
Document Type and Number:
WIPO Patent Application WO/2018/225415
Kind Code:
A1
Abstract:
Proposed is a method for producing a film substrate, by which a film substrate is produced by forming a film on a substrate, said film being capable of operating at high temperatures, by mixing a powder of a ferroelectric body and a sol-gel solution of a dielectric body with each other. According to the present invention, a film substrate is produced by forming a film on a substrate using a mixture of a powder and a sol-gel solution. The powder is composed of CaBi2Ta2O9. The mixture of a powder and a sol-gel solution is a mixture of a CaBi4Ti4O15 powder and a sol-gel solution of Bi4Ti3O12 and/or (Ba, Sr)TiO3. Consequently, a high sound wave transducer or a pressure sensitive sensor, which operates properly at 700°C and even at extremely high temperatures exceeding 800°C, is able to be produced. In addition, according to the present invention, polarization is able to be performed at, for example, 400°C or even around room temperature.
Inventors:
KOBAYASHI MAKIKO (JP)
NAKATSUMA KEI (JP)
TANABE MASAYUKI (JP)
NAKATSUMA KEI (JP)
TANABE MASAYUKI (JP)
Application Number:
PCT/JP2018/016866
Publication Date:
December 13, 2018
Filing Date:
April 25, 2018
Export Citation:
Assignee:
UNIV KUMAMOTO NAT UNIV CORP (JP)
International Classes:
H01L41/318; H01L21/316; H01L41/113; H01L41/187; H01L41/257; H04R17/00; H04R31/00
Foreign References:
| JP2012244369A | 2012-12-10 | |||
| JP2004319995A | 2004-11-11 | |||
| JP2007329460A | 2007-12-20 |
Other References:
KIBE, TAIGA ET AL.: "Continuous Monitoring at 600°C by CaBi4Ti4O15/Pb (Zr, Ti) O3 Sol-gel Composite Ultrasonic Transducer", IEEE INTERNATIONAL ULTRASONICS SYMPOSIUM (IUS), 3 November 2016 (2016-11-03), XP032988608
YAMAMOTO, TOMOYA ET AL.: "High Temrareture Ultrasonic Transducers by CaBi2Ta2O9/Pb (Zr, Ti) O3 Sol-Gel Composite", IEEE INTERNATIONAL ULTRASONICS SYMPOSIUM (IUS), 2 November 2017 (2017-11-02), XP033244975
YAMAMOTO, TOMOYA ET AL.: "High Temrareture Ultrasonic Transducers by CaBi2Ta2O9/Pb (Zr, Ti) O3 Sol-Gel Composite", IEEE INTERNATIONAL ULTRASONICS SYMPOSIUM (IUS), 2 November 2017 (2017-11-02), XP033244975
Attorney, Agent or Firm:
HADATE Shoji (JP)
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