Title:
SUBSTRATE FOR PHOTOELECTRIC CONVERSION DEVICE, PHOTOELECTRIC CONVERSION DEVICE USING SAME, METHOD FOR PRODUCING THE SUBSTRATE FOR PHOTOELECTRIC CONVERSION DEVICE, AND METHOD FOR MANUFACTURING THE PHOTOELECTRIC CONVERSION DEVICE
Document Type and Number:
WIPO Patent Application WO/2011/114541
Kind Code:
A1
Abstract:
Disclosed is a photoelectric conversion device (1) which comprises a substrate (2) and a transparent conductive film (3) that covers at least a part of the main surface of the substrate (2) and has a recessed and projected pattern in the surface that is on the closer side to a semiconductor layer. The photoelectric conversion device (1) also comprises a semiconductor layer (5) of a first conductivity type, which covers at least a part of the recessed and projected pattern of the transparent conductive film (3), and a light absorbing layer (6) that covers the semiconductor layer (5) of a first conductivity type. The recessed and projected pattern has a projected portion (10) that has a maximum height of 50-1200 nm (inclusive). The projected portion (10) has a fine recessed portion (11) in the surface, and the distance between local crests (15A, 15B) of the fine recessed portion (11) is 2-25 nm (inclusive). It is preferable for the semiconductor layer (5) of a first conductivity type that the thickness thereof in a portion formed on the bottom (26) of the fine recessed portion (11) is larger than the thicknesses thereof in portions other than the portion formed on the bottom (26). It is also preferable that the maximum depth (Bmax) of the interface between the semiconductor layer (5) of a first conductivity type and the light absorbing layer (6) is smaller than the maximum depth (Dmax) of the fine recessed portion.
Inventors:
NASUNO YOSHIYUKI
NISHIMURA KAZUHITO
TANIMURA HIROKI
KAJIHARA KEI
NISHIMURA KAZUHITO
TANIMURA HIROKI
KAJIHARA KEI
Application Number:
PCT/JP2010/055931
Publication Date:
September 22, 2011
Filing Date:
March 31, 2010
Export Citation:
Assignee:
SHARP KK (JP)
NASUNO YOSHIYUKI
NISHIMURA KAZUHITO
TANIMURA HIROKI
KAJIHARA KEI
NASUNO YOSHIYUKI
NISHIMURA KAZUHITO
TANIMURA HIROKI
KAJIHARA KEI
International Classes:
H01L31/04
Foreign References:
| JP2002280590A | 2002-09-27 | |||
| JPS62122179A | 1987-06-03 | |||
| JP2002164555A | 2002-06-07 | |||
| JPH07254721A | 1995-10-03 | |||
| JP2002141525A | 2002-05-17 | |||
| JP2008258517A | 2008-10-23 | |||
| JP2004296373A | 2004-10-21 |
Other References:
None
Attorney, Agent or Firm:
FUKAMI, Hisao et al. (JP)
Hisao Fukami (JP)
Hisao Fukami (JP)
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Claims: