SUBSTRATE PLACING APPARATUS PROVIDED WITH ALIGNMENT FUNCTION, AND FILM-FORMING APPARATUS HAVING THE SUBSTRATE PLACING APPARATUS

Title:

SUBSTRATE PLACING APPARATUS PROVIDED WITH ALIGNMENT FUNCTION, AND FILM-FORMING APPARATUS HAVING THE SUBSTRATE PLACING APPARATUS

Document Type and Number:

WIPO Patent Application WO/2011/161760

Kind Code:

A1

Abstract:

Disclosed is a substrate placing apparatus, which is provided with an alignment function, and has high durability and low cost. Through holes (9) are provided on the four sides of a placing table (12), and cylindrical sections (3) and shaft sections (4) respectively inserted into the cylindrical sections (3) are disposed in the through holes (9), respectively. Flange sections (8) are provided on the upper ends of respective shaft sections (3), a substrate (20) positioned above the placing table (12) is placed on the flange sections (8) by bringing up the cylindrical sections (3) and the shaft sections (4), the shaft sections (4) on the two sides out of the four sides are tilted toward the shaft sections (4) on the alignment sides, i.e., the other two sides, by means of a tilting mechanism, and alignment is performed by bringing the substrate (20) into contact with the side surfaces of the shaft sections (4) on the alignment sides by pressing the substrate (20). A camera and an XYθ stage are not needed, and alignment is performed with high accuracy.

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Inventors:

KATO, Yuko (INC. 2500, Hagisono, Chigasaki-sh, Kanagawa 43, 〒2538543, JP)
加藤　裕子 (〒43 神奈川県茅ヶ崎市萩園２５００　株式会社アルバック内 Kanagawa, 〒2538543, JP)
KIKUCHI, Masashi (INC. 2500, Hagisono, Chigasaki-sh, Kanagawa 43, 〒2538543, JP)
菊池　正志 (〒43 神奈川県茅ヶ崎市萩園２５００　株式会社アルバック内 Kanagawa, 〒2538543, JP)
KAMESAKI, Kouji (INC. 2500, Hagisono, Chigasaki-sh, Kanagawa 43, 〒2538543, JP)
亀崎　厚治 (〒43 神奈川県茅ヶ崎市萩園２５００　株式会社アルバック内 Kanagawa, 〒2538543, JP)
OKAYAMA, Tomohiko (INC. 2500, Hagisono, Chigasaki-sh, Kanagawa 43, 〒2538543, JP)
岡山　智彦 (〒43 神奈川県茅ヶ崎市萩園２５００　株式会社アルバック内 Kanagawa, 〒2538543, JP)
HORI, Eisuke (INC. 2500, Hagisono, Chigasaki-sh, Kanagawa 43, 〒2538543, JP)

Application Number:

JP2010/060515

Publication Date:

December 29, 2011

Filing Date:

June 22, 2010

Export Citation:

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Assignee:

ULVAC, INC. (2500, Hagisono Chigasaki-sh, Kanagawa 43, 〒2538543, JP)
株式会社アルバック (〒43 神奈川県茅ヶ崎市萩園２５００ Kanagawa, 〒2538543, JP)
KATO, Yuko (INC. 2500, Hagisono, Chigasaki-sh, Kanagawa 43, 〒2538543, JP)
加藤　裕子 (〒43 神奈川県茅ヶ崎市萩園２５００　株式会社アルバック内 Kanagawa, 〒2538543, JP)
KIKUCHI, Masashi (INC. 2500, Hagisono, Chigasaki-sh, Kanagawa 43, 〒2538543, JP)
菊池　正志 (〒43 神奈川県茅ヶ崎市萩園２５００　株式会社アルバック内 Kanagawa, 〒2538543, JP)
KAMESAKI, Kouji (INC. 2500, Hagisono, Chigasaki-sh, Kanagawa 43, 〒2538543, JP)
亀崎　厚治 (〒43 神奈川県茅ヶ崎市萩園２５００　株式会社アルバック内 Kanagawa, 〒2538543, JP)
OKAYAMA, Tomohiko (INC. 2500, Hagisono, Chigasaki-sh, Kanagawa 43, 〒2538543, JP)
岡山　智彦 (〒43 神奈川県茅ヶ崎市萩園２５００　株式会社アルバック内 Kanagawa, 〒2538543, JP)

International Classes:

B65G49/06; H01L21/68

Attorney, Agent or Firm:

ISHIJIMA, Shigeo et al. (Toranomonkougyou Bldg, 3F, 1-2-18, Toranomon, Minato-k, Tokyo 01, 〒1050001, JP)

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Claims:

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