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Patent Searching and Data

Document Type and Number:
WIPO Patent Application WO/2010/146981
Kind Code:
Provided is a substrate placing table wherein a substrate temporarily placing table (105) is provided with: a base (140); a supporting part (143) which extends upward from the base (140) and is capable of supporting, on the upper end portion thereof, a substrate to be placed; and a pallet (146), which is disposed on the base (140) such that the pallet is positioned below the upper end portion of the supporting part (143), is provided to be displaced upward and is capable of placing thereon the glass substrate (W1) which is supported by means of the upper end portion of the base (140).

OHKAWARA, Junpei (())
Application Number:
Publication Date:
December 23, 2010
Filing Date:
May 31, 2010
Export Citation:
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SHARP KABUSHIKI KAISHA (22-22, Nagaike-cho Abeno-ku, Osaka-sh, Osaka 22, 〒5458522, JP)
シャープ株式会社 (〒22 大阪府大阪市阿倍野区長池町22番22号 Osaka, 〒5458522, JP)
International Classes:
H01L21/673; B65G49/06
Attorney, Agent or Firm:
FUKAMI, Hisao et al. (Fukami Patent Office, Nakanoshima Central Tower 22nd Floor, 2-7, Nakanoshima 2-chome, Kita-ku, Osaka-sh, Osaka 05, 〒5300005, JP)
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