Title:
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
Document Type and Number:
WIPO Patent Application WO/2008/029848
Kind Code:
A1
Abstract:
Disclosed are a substrate processing apparatus and a substrate processing method,
wherein a resist can be removed from a substrate well and a processing liquid used
for the resist removal can be reused. Specifically disclosed is a substrate
processing apparatus comprising a substrate holding means for holding a substrate,
a persulfuric acid-producing means for producing a persulfuric acid by using
a sulfuric acid, a mixing means for mixing the persulfuric acid produced by the
persulfuric acid-producing means with a sulfuric acid having a higher temperature
and a higher concentration than the sulfuric acid used in the persulfuric acid-producing
means, and an ejecting means for ejecting the mixed solution of the persulfuric
acid and the sulfuric acid, which is obtained by the mixing means as a processing
liquid for removing a resist from the substrate, onto the substrate held by the
substrate holding means.
Inventors:
NAGAI, Tatsuo (4-7 Nishi-Shinjuku 3-chome, Shinjuku-k, Tokyo 83, 1608383, JP)
永井 達夫 (〒83 東京都新宿区西新宿三丁目４番７号 栗田工業株式会社内 Tokyo, 1608383, JP)
MORITA, Hiroshi (4-7 Nishi-Shinjuku 3-chome, Shinjuku-k, Tokyo 83, 1608383, JP)
森田 博志 (〒83 東京都新宿区西新宿三丁目４番７号 栗田工業株式会社内 Tokyo, 1608383, JP)
TAKAHASHI, Hiroaki (1-1, Tenjinkita-cho, Teranouchi-agaru 4-chome, Horikawa-dori, Kamigyo-ku, Kyoto-sh, Kyoto 85, 6028585, JP)
永井 達夫 (〒83 東京都新宿区西新宿三丁目４番７号 栗田工業株式会社内 Tokyo, 1608383, JP)
MORITA, Hiroshi (4-7 Nishi-Shinjuku 3-chome, Shinjuku-k, Tokyo 83, 1608383, JP)
森田 博志 (〒83 東京都新宿区西新宿三丁目４番７号 栗田工業株式会社内 Tokyo, 1608383, JP)
TAKAHASHI, Hiroaki (1-1, Tenjinkita-cho, Teranouchi-agaru 4-chome, Horikawa-dori, Kamigyo-ku, Kyoto-sh, Kyoto 85, 6028585, JP)
Application Number:
JP2007/067315
Publication Date:
March 13, 2008
Filing Date:
September 05, 2007
Export Citation:
Assignee:
KURITA WATER INDUSTRIES LTD. (4-7 Nishi-Shinjuku 3-chome, Shinjuku-ku Tokyo, 83, 1608383, JP)
栗田工業株式会社 (〒83 東京都新宿区西新宿三丁目４番７号 Tokyo, 1608383, JP)
DAINIPPON SCREEN MFG. CO., LTD. (1-1 Tenjinkita-cho, Teranouchi-agaru 4-chome Horikawa-dori, Kamigyo-ku, Kyoto-sh, Kyoto 85, 6028585, JP)
大日本スクリーン製造株式会社 (〒85 京都府京都市上京区堀川通寺之内上る４丁目天神北町１番地の１ Kyoto, 6028585, JP)
NAGAI, Tatsuo (4-7 Nishi-Shinjuku 3-chome, Shinjuku-k, Tokyo 83, 1608383, JP)
永井 達夫 (〒83 東京都新宿区西新宿三丁目４番７号 栗田工業株式会社内 Tokyo, 1608383, JP)
MORITA, Hiroshi (4-7 Nishi-Shinjuku 3-chome, Shinjuku-k, Tokyo 83, 1608383, JP)
栗田工業株式会社 (〒83 東京都新宿区西新宿三丁目４番７号 Tokyo, 1608383, JP)
DAINIPPON SCREEN MFG. CO., LTD. (1-1 Tenjinkita-cho, Teranouchi-agaru 4-chome Horikawa-dori, Kamigyo-ku, Kyoto-sh, Kyoto 85, 6028585, JP)
大日本スクリーン製造株式会社 (〒85 京都府京都市上京区堀川通寺之内上る４丁目天神北町１番地の１ Kyoto, 6028585, JP)
NAGAI, Tatsuo (4-7 Nishi-Shinjuku 3-chome, Shinjuku-k, Tokyo 83, 1608383, JP)
永井 達夫 (〒83 東京都新宿区西新宿三丁目４番７号 栗田工業株式会社内 Tokyo, 1608383, JP)
MORITA, Hiroshi (4-7 Nishi-Shinjuku 3-chome, Shinjuku-k, Tokyo 83, 1608383, JP)
International Classes:
H01L21/027; B08B3/02; B08B3/08; G02F1/13; H01L21/304; G11B7/26
Attorney, Agent or Firm:
INAOKA, Kosaku et al. (TRADEMARK ATTORNEYSSun Mullion NBF Tower, 21st Floor,6-12, Minamihommachi 2-chome,Chuo-k, Osaka-shi Osaka 54, 5410054, JP)
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