Title:
SUBSTRATE-PROCESSING APPARATUS, MODEL DATA GENERATION APPARATUS, SUBSTRATE-PROCESSING METHOD, AND MODEL GENERATION METHOD
Document Type and Number:
WIPO Patent Application WO/2023/026895
Kind Code:
A1
Abstract:
According to the present invention, a storage unit is configured to store processing conditions for substrate processing, attitudes of movable parts that affect the processing result of the substrate processing, and model data generated from data storing a plurality of patterns of processing results of the substrate processing. A processing control unit is configured to, using the model data stored in the storage unit, perform control of the substrate processing, including control of the processing conditions for the substrate processing and the attitudes of the movable parts, according to the conditions that the processing results of the substrate processing should satisfy.
Inventors:
MORIYA TSUYOSHI (JP)
YAMAGISHI TAKAYUKI (JP)
FURUYA HARUHIKO (JP)
MORI KIYOSHI (JP)
YAMAGISHI TAKAYUKI (JP)
FURUYA HARUHIKO (JP)
MORI KIYOSHI (JP)
Application Number:
PCT/JP2022/030940
Publication Date:
March 02, 2023
Filing Date:
August 16, 2022
Export Citation:
Assignee:
TOKYO ELECTRON LTD (JP)
International Classes:
H01L21/205; H01L21/3065; H01L21/31
Domestic Patent References:
| WO2021157453A1 | 2021-08-12 | |||
| WO2020178945A1 | 2020-09-10 |
Foreign References:
| JP2020053506A | 2020-04-02 | |||
| JP2009507370A | 2009-02-19 | |||
| JP2019530207A | 2019-10-17 | |||
| JP2020136502A | 2020-08-31 | |||
| JP2021117394A | 2021-08-10 | |||
| JP2009081267A | 2009-04-16 | |||
| JP2013084746A | 2013-05-09 |
Attorney, Agent or Firm:
SAKAI INTERNATIONAL PATENT OFFICE (JP)
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