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Patent Searching and Data


Title:
SUBSTRATE PROCESSING APPARATUS AND ROTARY ELECTRIC CONNECTOR FOR VACUUM
Document Type and Number:
WIPO Patent Application WO/2018/230883
Kind Code:
A1
Abstract:
A substrate processing apparatus according to an embodiment of the present invention comprises: a disc comprising a plurality of electrostatic chucks periodically disposed on a constant radius from a central axis; a disc support for supporting the disc; a DC line electrically connected to the plurality of electrostatic chucks through the disc support; and a power supply for supplying power to the DC line. The DC line comprises: a first DC line passing through the disc support in the power supply; a power distribution unit for distributing the first DC line to connect the first DC line to each of the plurality of electrostatic chucks; and a plurality of second DC lines connected to each of the plurality of electrostatic chucks in the power distribution unit.

Inventors:
YOON, Ho Bin (240 Opo-ro, Opo-eupGwangju-si, Gyeonggi-do, 12773, KR)
SHIN, Seung Chul (240 Opo-ro, Opo-eupGwangju-si, Gyeonggi-do, 12773, KR)
YOO, Jin Hyuk (240 Opo-ro, Opo-eupGwangju-si, Gyeonggi-do, 12773, KR)
Application Number:
KR2018/006511
Publication Date:
December 20, 2018
Filing Date:
June 08, 2018
Export Citation:
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Assignee:
JUSUNG ENGINEERING CO., LTD. (240 Opo-ro, Opo-eupGwangju-si, Gyeonggi-do, 12773, KR)
International Classes:
H01L21/683; H01L21/687; H01R39/08; H01R39/18; H01R39/38
Domestic Patent References:
WO2016126360A12016-08-11
Foreign References:
KR20170027641A2017-03-10
KR20170017855A2017-02-15
JP2011187566A2011-09-22
KR20160073281A2016-06-24
Attorney, Agent or Firm:
NURY PATENT LAW FIRM (4F 15-5, Teheran-ro 25-gilGangnam-gu, Seoul, 06131, KR)
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