Title:
SUBSTRATE PROCESSING APPARATUS, TEMPERATURE MEASUREMENT METHOD AND TEMPERATURE CONTROL METHOD
Document Type and Number:
WIPO Patent Application WO/2022/225221
Kind Code:
A1
Abstract:
The present invention relates to a substrate processing apparatus and a temperature measurement method and a temperature control method, the substrate processing apparatus according to the present invention comprising: a chamber providing a processing space; a susceptor on which a substrate can be seated; a heater unit for heating the susceptor; a temperature measurement unit for measuring a temperature of the substrate; and a control unit for controlling the heater unit by using the temperature of the substrate, wherein the temperature measurement unit comprises: a first measurement unit for measuring the temperature of the substrate, inside the chamber; a second measurement unit for measuring the temperature of the substrate, outside the chamber; a storage unit for storing first data measured by the first measurement unit, second data measured by the second measurement unit, and third data calculated using the first data and the second data; and a determination unit for calculating the temperature of the substrate by using the third data. Accordingly, a temperature of means for heating the substrate may be controlled by measuring the temperature of the substrate while transferring the substrate out of the chamber and calculating the temperature of the substrate when the substrate is inside the chamber on the basis of a reference temperature.
Inventors:
KWON OH HYEON (KR)
BACK IN WOO (KR)
BACK IN WOO (KR)
Application Number:
PCT/KR2022/004645
Publication Date:
October 27, 2022
Filing Date:
March 31, 2022
Export Citation:
Assignee:
JUSUNG ENG CO LTD (KR)
International Classes:
H01L21/67; C23C16/46
Foreign References:
| US20200395233A1 | 2020-12-17 | |||
| US20190276934A1 | 2019-09-12 | |||
| JP2005183485A | 2005-07-07 | |||
| KR20010081441A | 2001-08-29 | |||
| US20180323092A1 | 2018-11-08 |
Attorney, Agent or Firm:
PARK, Byeong Suk (KR)
Download PDF: