Title:
SUBSTRATE PROCESSING APPARATUS AND TEMPORARY STORAGE SHELF
Document Type and Number:
WIPO Patent Application WO/2011/148782
Kind Code:
A1
Abstract:
Disclosed is a substrate processing apparatus wherein, even if one transfer robot is stopped, deterioration of productivity is suppressed by having the other transfer robot operate. The substrate processing apparatus (200) that processes a substrate (10) is provided with a substrate carry-in chamber (61), a first transfer robot area (63), a first substrate processing chamber (51), a storage shelf area (64), a second transfer robot area (65), and a second substrate processing chamber (52). In a temporary storage shelf (100) disposed in the temporary storage shelf area (64), an arm intrusion cover (30) that covers an opening (21B) on the second transfer robot area (65) side is disposed, and furthermore, the temporary storage shelf (100) is provided with a stop switch (40) that stops driving of the second transfer robot (70B) in a state wherein the opening (21B) is covered with the arm intrusion cover (30).
Inventors:
TASHIRO, Shouichi (())
Application Number:
JP2011/060747
Publication Date:
December 01, 2011
Filing Date:
May 10, 2011
Export Citation:
Assignee:
SHARP KABUSHIKI KAISHA (22-22, Nagaike-cho Abeno-ku, Osaka-sh, Osaka 22, 〒5458522, JP)
シャープ株式会社 (〒22 大阪府大阪市阿倍野区長池町２２番２２号 Osaka, 〒5458522, JP)
シャープ株式会社 (〒22 大阪府大阪市阿倍野区長池町２２番２２号 Osaka, 〒5458522, JP)
International Classes:
B65G49/06; H01L21/677
Attorney, Agent or Firm:
TESHIMA Masaru (Teshima Patent Law Firm, 5F MF MinamiMorimachi Bldg. 2-3-8, Tenjinbashi, Kita-ku, Osaka-sh, Osaka 41, 〒5300041, JP)
Claims: