Title:
SUBSTRATE PROCESSING APPARATUS
Document Type and Number:
WIPO Patent Application WO/2014/042488
Kind Code:
A2
Abstract:
According to one embodiment of the present invention, a substrate processing apparatus for processing a substrate comprises: a main chamber having an open top and having a passage formed in one side wall thereof to allow entry/exit of the substrate; a chamber cover which is arranged on the open top of the main chamber and which forms a process space blocked from the outside to perform the process; a susceptor plate which has an inner space having an open bottom, and on which the substrate is placed; and a main heater rotatably arranged in the inner space and spaced apart from the susceptor plate to heat the susceptor plate.
Inventors:
YANG IL-KWANG (KR)
SONG BYOUNG-GYU (KR)
KIM KYONG-HUN (KR)
KIM YONG-KI (KR)
SHIN YANG-SIK (KR)
SONG BYOUNG-GYU (KR)
KIM KYONG-HUN (KR)
KIM YONG-KI (KR)
SHIN YANG-SIK (KR)
Application Number:
PCT/KR2013/008433
Publication Date:
March 20, 2014
Filing Date:
September 17, 2013
Export Citation:
Assignee:
EUGENE TECHNOLOGY CO LTD (KR)
Foreign References:
| JP2001274094A | 2001-10-05 | |||
| JP3099101B2 | 2000-10-16 | |||
| US5683518A | 1997-11-04 | |||
| KR20050105559A | 2005-11-04 |
Attorney, Agent or Firm:
JEONG, Seong-Jin (KR)
정성진 (KR)
정성진 (KR)
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