Title:
SUBSTRATE PROCESSING APPARATUS
Document Type and Number:
WIPO Patent Application WO/2015/016492
Kind Code:
A1
Abstract:
According to one embodiment of the present invention, a substrate processing apparatus comprises: a chamber in which a substrate is transferred through a path formed at one side thereof, providing an inner space in which processing for the substrate is performed, and having a supply port, which supplies gas to the inner space, formed on the opposite side of the path; a susceptor provided in the inner space and in which the substrate is positioned at the upper part thereof; and a diffusion member provided between the susceptor and the sidewall of the chamber so as to be adjacent to the supply port and having a plurality of diffusion holes for diffusing the gas supplied through the supply port.
Inventors:
SONG BYOUNG-GYU (KR)
KIM YONG-KI (KR)
KIM KYONG-HUN (KR)
KIM CHANG DOL (KR)
SHIN YANG-SIK (KR)
YANG IL-KWANG (KR)
SHIN CHANG HUN (KR)
KIM EUN DUCK (KR)
KIM YONG-KI (KR)
KIM KYONG-HUN (KR)
KIM CHANG DOL (KR)
SHIN YANG-SIK (KR)
YANG IL-KWANG (KR)
SHIN CHANG HUN (KR)
KIM EUN DUCK (KR)
Application Number:
PCT/KR2014/005882
Publication Date:
February 05, 2015
Filing Date:
July 02, 2014
Export Citation:
Assignee:
EUGENE TECHNOLOGY CO LTD (KR)
International Classes:
H01L21/205
Foreign References:
| KR930001897B1 | 1993-03-19 | |||
| KR100474971B1 | 2005-03-10 | |||
| KR20110006093A | 2011-01-20 | |||
| JP2001257170A | 2001-09-21 |
Attorney, Agent or Firm:
JEONG, Seong-Jin (KR)
정성진 (KR)
정성진 (KR)
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