Title:
SUBSTRATE PROCESSING DEVICE, ALARM MANAGEMENT METHOD OF SUBSTRATE PROCESSING DEVICE AND STORAGE MEDIUM
Document Type and Number:
WIPO Patent Application WO/2013/047651
Kind Code:
A1
Abstract:
This substrate processing device is provided with: detection units (41a to 41d) for detecting a cause for interlocking operations to have been performed for one or more among a plurality of modules so as to output detection signals; interlocking means (42, and 43a to 43c) which, on the basis of the detection signals from the detection units, perform interlocking operations for the modules for which interlocking operations are to be performed if a cause for an interlocking operation to be performed occurs; and an alarm management unit (4) which determines parent-child relationships between a parent alarm, which indicates that a cause for performing an interlocking operation has been detected, and child alarms, which indicate that interlocking operations have been performed for each module, in order to group the parent alarm and the child alarms that are in parent-child relationships so as to display the same upon a display unit (5).
Inventors:
KANEKO TOMOHIRO (JP)
Application Number:
PCT/JP2012/074874
Publication Date:
April 04, 2013
Filing Date:
September 27, 2012
Export Citation:
Assignee:
TOKYO ELECTRON LTD (JP)
KANEKO TOMOHIRO (JP)
KANEKO TOMOHIRO (JP)
International Classes:
G05B23/02
Foreign References:
| JP2011118739A | 2011-06-16 | |||
| JP2005276046A | 2005-10-06 | |||
| JPH05333186A | 1993-12-17 |
Attorney, Agent or Firm:
KATSUNUMA Hirohito et al. (JP)
Katsunuma Hirohito (JP)
Katsunuma Hirohito (JP)
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