Title:
SUBSTRATE PROCESSING DEVICE AND SUBSTRATE PROCESSING METHOD
Document Type and Number:
WIPO Patent Application WO/2020/008955
Kind Code:
A1
Abstract:
This substrate processing device for processing a substrate, has a plurality of processing modules that each perform a predetermined process on a substrate, and an information display unit that displays information about an error having occurred in the predetermined process. The information display unit displays, in the same screen, the substrate on which the predetermined process has been performed in which the error occurred, the processing module that has performed the predetermined process in which the error occurred, the time when the error occurred, and the main cause of the error.
Inventors:
NAKAGOMI WATARU (JP)
MUKOYAMA TATSUYA (JP)
KAZAMA KAZUNORI (JP)
KUBOTA SHIGERU (JP)
ICHINOSE SHO (JP)
CHIZUWA JUNYA (JP)
KOMIYAMA AKIHITO (JP)
HIGASHIMURA RYUHEI (JP)
MUKOYAMA TATSUYA (JP)
KAZAMA KAZUNORI (JP)
KUBOTA SHIGERU (JP)
ICHINOSE SHO (JP)
CHIZUWA JUNYA (JP)
KOMIYAMA AKIHITO (JP)
HIGASHIMURA RYUHEI (JP)
Application Number:
PCT/JP2019/025160
Publication Date:
January 09, 2020
Filing Date:
June 25, 2019
Export Citation:
Assignee:
TOKYO ELECTRON LTD (JP)
International Classes:
H01L21/02; H01L21/027; H01L21/302; H01L21/3065
Foreign References:
| JP2003273003A | 2003-09-26 | |||
| JPH11214276A | 1999-08-06 | |||
| JP2008311461A | 2008-12-25 |
Attorney, Agent or Firm:
KANEMOTO, Tetsuo et al. (JP)
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