Title:
SUBSTRATE PROCESSING DEVICE AND SHOWER HEAD MANUFACTURING DEVICE
Document Type and Number:
WIPO Patent Application WO/2024/043448
Kind Code:
A1
Abstract:
The present invention relates to a substrate processing device and a shower head manufacturing device, and, to: a substrate processing device in which a shower head manufactured by referring to a substrate map is mounted; and a shower head manufacturing device for manufacturing the shower head. The substrate processing device according to an embodiment of the present invention comprises: a process chamber for providing a process treatment space for processing of a substrate; and a shower head which is provided in the process chamber, and which sprays a process gas at the substrate, wherein the shower head comprises a spray body for receiving the process gas, and a spray unit arranged on one side of the spray body so as to spray the process gas having flowed into the spray body, and the spray body comprises a baffle plate manufactured using map data related to the thickness distribution of a thin film deposited on a test substrate by means of the process gas sprayed from the spray unit.
Inventors:
KANG DONG SUK (KR)
Application Number:
PCT/KR2023/007369
Publication Date:
February 29, 2024
Filing Date:
May 30, 2023
Export Citation:
Assignee:
HANWHA PREC MACH CO LTD (KR)
International Classes:
C23C16/455; C23C16/52
Domestic Patent References:
| WO2001003163A1 | 2001-01-11 |
Foreign References:
| KR20140029334A | 2014-03-10 | |||
| KR20130012361A | 2013-02-04 | |||
| US20190228120A1 | 2019-07-25 | |||
| KR102323037B1 | 2021-11-10 |
Attorney, Agent or Firm:
KASAN IP & LAW FIRM (KR)
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