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Patent Searching and Data


Title:
SUBSTRATE PROCESSING DEVICE
Document Type and Number:
WIPO Patent Application WO/2011/099563
Kind Code:
A1
Abstract:
Disclosed is a substrate processing device provided with: a transfer unit that transfers a strip-shaped sheet substrate in a first direction; a plurality of processing units that process a plurality of sections that segment the sheet substrate in a second direction, which intersects the first direction; and stage devices, one for each processing unit, that support the sheet substrate.

Inventors:
SUZUKI TOMONARI (JP)
Application Number:
PCT/JP2011/052879
Publication Date:
August 18, 2011
Filing Date:
February 10, 2011
Export Citation:
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Assignee:
NIKON CORP (JP)
SUZUKI TOMONARI (JP)
International Classes:
G03F9/00
Foreign References:
JP2001235877A2001-08-31
JPH11340120A1999-12-10
JP2006235533A2006-09-07
JP2009237334A2009-10-15
JP2006106505A2006-04-20
JPH09115812A1997-05-02
Attorney, Agent or Firm:
SHIGA Masatake et al. (JP)
Masatake Shiga (JP)
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