Title:
SUBSTRATE PROCESSING DEVICE
Document Type and Number:
WIPO Patent Application WO/2021/162447
Kind Code:
A2
Abstract:
According to an embodiment of the present invention, a substrate processing device comprises: a susceptor on which a substrate is placed; a shower head located above the susceptor and supplying a processing gas toward the susceptor; first and second support members which are installed above the shower head and respectively support one side and the other side of the shower head with respect to the center of the shower head; and a first driving unit which is connected to the first support member and can adjust the distance between the one side of the shower head and the susceptor.
Inventors:
KIM YONG KI (KR)
SON SUNG GYUN (KR)
HUH DONG BEEN (KR)
LEE TAE HO (KR)
SON SUNG GYUN (KR)
HUH DONG BEEN (KR)
LEE TAE HO (KR)
Application Number:
PCT/KR2021/001781
Publication Date:
August 19, 2021
Filing Date:
February 10, 2021
Export Citation:
Assignee:
EUGENE TECHNOLOGY CO LTD (KR)
International Classes:
C23C16/455; C23C16/458; C23C16/52
Attorney, Agent or Firm:
JEONG, Seong-Jin (KR)
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