Title:
SUBSTRATE PROCESSING METHOD, SUBSTRATE PROCESSING DEVICE, AND SUBSTRATE PROCESSING SYSTEM
Document Type and Number:
WIPO Patent Application WO/2020/039762
Kind Code:
A1
Abstract:
A camera (70) acquires an image by continuously imaging a nozzle (30) moving within a processing section (PS1). A reference image registration unit (90) registers first and second reference images (RP1, RP2) that are obtained by imaging the nozzle (30) at a first end (TE1) and a second end (TE2) of the processing section (PS1). A displacement detection unit (91) includes an image determination unit (910) that determines whether an actual image (GP) obtained by imaging the nozzle (30) moving in the processing section (PS1) with a camera is an image corresponding to either of the first and second ends, on the basis of a prearranged determination rule, and an image comparison unit (912) that compares the first and second reference images (RP1, RP2) with the actual image (GP) that is determined by the image determination unit (910) to correspond to either of the first and second ends.
Inventors:
NAOHARA HIDEJI (JP)
OKITA YUJI (JP)
KAKUMA HIROAKI (JP)
MASUI TATSUYA (JP)
OKITA YUJI (JP)
KAKUMA HIROAKI (JP)
MASUI TATSUYA (JP)
Application Number:
PCT/JP2019/026480
Publication Date:
February 27, 2020
Filing Date:
July 03, 2019
Export Citation:
Assignee:
SCREEN HOLDINGS CO LTD (JP)
International Classes:
H01L21/304; H01L21/027; H01L21/306
Foreign References:
| JP2015173204A | 2015-10-01 | |||
| JP2016070693A | 2016-05-09 | |||
| JP2017083257A | 2017-05-18 |
Attorney, Agent or Firm:
YOSHITAKE Hidetoshi et al. (JP)
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