Title:
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING DEVICE
Document Type and Number:
WIPO Patent Application WO/2015/107955
Kind Code:
A1
Abstract:
Provided is a technique for preventing a drop in the throughput of a substrate processing device when a malfunction occurs. When an event rendering a recipe no longer executable at a processing unit occurs, depending on the type of the event that has occurred, there are cases where execution of a different recipe at said processing unit is possible. Types of events that may occur and replacement recipes that can replace recipes in mid-execution are associated in advance. When a malfunction occurs, whether or not a recipe in mid-execution can be replaced by a different recipe is examined, and whether or not that different recipe, if the mid-execution recipe can be replaced thereby, is included in an uncompleted job is examined. If these conditions are met, the substrate processing schedule is changed in such a way that, subsequently, the replacement recipe is executed at said processing unit. If the conditions are not met, substrate processing at said processing unit is interrupted. Interruption of substrate processing in the substrate processing device can be avoided as much as possible.
Inventors:
YAMAMOTO MASAHIRO (JP)
Application Number:
PCT/JP2015/050246
Publication Date:
July 23, 2015
Filing Date:
January 07, 2015
Export Citation:
Assignee:
SCREEN HOLDINGS CO LTD (JP)
International Classes:
H01L21/304; H01L21/02; H01L21/677
Foreign References:
| JP2003203833A | 2003-07-18 | |||
| JPH0837156A | 1996-02-06 |
Attorney, Agent or Firm:
YOSHITAKE Hidetoshi et al. (JP)
Hidetoshi Yoshitake (JP)
Hidetoshi Yoshitake (JP)
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