Login| Sign Up| Help| Contact|

Patent Searching and Data


Title:
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING DEVICE
Document Type and Number:
WIPO Patent Application WO/2019/198575
Kind Code:
A1
Abstract:
A substrate processing method for drying a substrate including a pattern formation surface in which a pattern with a recess is formed. The substrate processing method comprises: a sacrifice layer forming step of forming a sacrifice layer conforming to a surface of the pattern on the pattern formation surface; a fill layer forming step of forming, in a state in which the sacrifice layer is formed, a fill layer for filling the recess of the pattern in the pattern formation surface; a vaporizing step of vaporizing the sacrifice layer in the state in which the fill layer is formed; and a peeling step of peeling, after the sacrifice layer has been vaporized, the fill layer from the pattern formation surface.

Inventors:
ABE, Hiroshi (1-1, Tenjinkita-machi, Teranouchi-agaru 4-chome, Horikawa-dori, Kamigyo-ku, Kyoto-sh, Kyoto 85, 〒6028585, JP)
OKUTANI, Manabu (1-1, Tenjinkita-machi, Teranouchi-agaru 4-chome, Horikawa-dori, Kamigyo-ku, Kyoto-sh, Kyoto 85, 〒6028585, JP)
KANEMATSU, Yasunori (1-1, Tenjinkita-machi, Teranouchi-agaru 4-chome, Horikawa-dori, Kamigyo-ku, Kyoto-sh, Kyoto 85, 〒6028585, JP)
Application Number:
JP2019/014686
Publication Date:
October 17, 2019
Filing Date:
April 02, 2019
Export Citation:
Click for automatic bibliography generation   Help
Assignee:
SCREEN HOLDINGS CO., LTD. (1-1 Tenjinkita-machi, Teranouchi-agaru 4-chome Horikawa-dori, Kamigyo-ku, Kyoto-sh, Kyoto 85, 〒6028585, JP)
International Classes:
H01L21/304; F26B5/16; F26B9/00
Foreign References:
JP2013042094A2013-02-28
JP2018056553A2018-04-05
JP2011124313A2011-06-23
Attorney, Agent or Firm:
AI ASSOCIATION OF PATENT AND TRADEMARK ATTORNEYS (Sun Mullion NBF Tower, 21st Floor 6-12, Minamihommachi 2-chome, Chuo-ku, Osaka-sh, Osaka 54, 〒5410054, JP)
Download PDF:



 
Previous Patent: ENDOSCOPE SYSTEM

Next Patent: MEDICAL IMAGE PROCESSING DEVICE