Title:
SUBSTRATE-PROCESSING SYSTEM AND SUBSTRATE TRANSFER METHOD
Document Type and Number:
WIPO Patent Application WO/2010/082750
Kind Code:
A2
Abstract:
The present invention relates to a substrate processing system and to a substrate transfer method, in which substrates are transferred in two directions between a plurality of processing chambers arranged in a line through a substrate transfer apparatus, thereby improving the efficiency of substrate transfer. The substrate-processing system comprises: a transfer chamber having at least one bidirectional substrate transfer apparatus for transferring a substrate in two directions; and a plurality of processing chambers arranged in a line facing the transfer chamber to perform a semiconductor fabrication process on the substrate. The bidirectional substrate transfer apparatus includes a transfer unit installed in the transfer chamber to transfer the substrate in the horizontal direction by a linear motor; and a bidirectional substrate transfer unit which is installed in the transfer unit, and which slides in two directions to transfer the substrate to the processing chambers.
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Inventors:
LEE, Kyoo Hwan (1 LG Apt, Yeonwonmaeul,Mabuk-dong, Giheung-gu, Yongin-si Gyeonggi-do 446-936, 446-936, KR)
이규환 (경기도 용인시 기흥구 마북동 연원마을 LG, 446-936 Gyeonggi-do, 446-936, KR)
MOON, Duck Won (2370, Yongdam 3-don, Jeju-si Jeju-do 690-043, 690-043, KR)
이규환 (경기도 용인시 기흥구 마북동 연원마을 LG, 446-936 Gyeonggi-do, 446-936, KR)
MOON, Duck Won (2370, Yongdam 3-don, Jeju-si Jeju-do 690-043, 690-043, KR)
Application Number:
KR2010/000184
Publication Date:
July 22, 2010
Filing Date:
January 12, 2010
Export Citation:
Assignee:
JUSUNG ENGINEERING Co., Ltd. (49 Neungpyeong-ri, Opo-eu, Gwangju-si Gyeonggi-do 464-892, 464-892, KR)
주성엔지니어링(주) (경기도 광주시 오포읍 능평리 49, 464-892 Gyeonggi-do, 464-892, KR)
LEE, Kyoo Hwan (1 LG Apt, Yeonwonmaeul,Mabuk-dong, Giheung-gu, Yongin-si Gyeonggi-do 446-936, 446-936, KR)
이규환 (경기도 용인시 기흥구 마북동 연원마을 LG, 446-936 Gyeonggi-do, 446-936, KR)
주성엔지니어링(주) (경기도 광주시 오포읍 능평리 49, 464-892 Gyeonggi-do, 464-892, KR)
LEE, Kyoo Hwan (1 LG Apt, Yeonwonmaeul,Mabuk-dong, Giheung-gu, Yongin-si Gyeonggi-do 446-936, 446-936, KR)
이규환 (경기도 용인시 기흥구 마북동 연원마을 LG, 446-936 Gyeonggi-do, 446-936, KR)
International Classes:
H01L21/677
Attorney, Agent or Firm:
ASTRAN INT'l IP GROUP (5th Floor, Shin Sung Bldg.,732-27, Yeoksam-dong,Gangnam-gu, Seoul 135-514, 135-514, KR)
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