SUBSTRATE PROCESSING UNIT AND SUBSTRATE PROCESSING APPARATUS

Title:

SUBSTRATE PROCESSING UNIT AND SUBSTRATE PROCESSING APPARATUS

Document Type and Number:

WIPO Patent Application WO/2005/105322

Kind Code:

A1

Abstract:

A substrate processing unit allows reduction of a space required for the entire substrate processing and reduction of energy required for substrate transportation, by performing a process by using different processing solutions in one substrate processing unit. The substrate processing unit is provided with a vertically movable substrate holding part (72) for holding a substrate (W); an outer tank (70) which surrounds the circumference of the substrate holding part (72); an inner tank (74), which is positioned at a lower part of the substrate holding part (72), arranged inside the outer tank (70) and has a chemical processing part (84) inside; and a spray processing cup (76), which can freely cover an upper edge opening part of the inner tank (74) and has a plurality of spray nozzles (116, 118) for separately spraying at least two types of processing solutions. The outer tank (70) and the inner tank (74) are provided with separate drainage lines (78, 92).

Inventors:

Katsuoka, Seiji c/o Ebara Corporation (11-1 Haneda Asahi-cho, Ohta-k, Tokyo 10, 14485, JP)
Sekimoto, Masahiko c/o Ebara Corporation (11-1 Haneda Asahi-cho, Ohta-k, Tokyo 10, 14485, JP)
Watanabe, Teruyuki c/o Ebara Corporation (11-1 Haneda Asahi-cho, Ohta-k, Tokyo 10, 14485, JP)
Kato, Ryo c/o Ebara Corporation (11-1 Haneda Asahi-cho, Ohta-k, Tokyo 10, 14485, JP)
Yokoyama, Toshio c/o Ebara Corporation (11-1 Haneda Asahi-cho, Ohta-k, Tokyo 10, 14485, JP)
Suzuki, Kenichi c/o Ebara Corporation (11-1 Haneda Asahi-cho, Ohta-k, Tokyo 10, 14485, JP)
Kobayashi, Kenichi c/o Ebara Corporation (11-1 Haneda Asahi-cho, Ohta-k, Tokyo 10, 14485, JP)

Application Number:

PCT/JP2005/008455

Publication Date:

November 10, 2005

Filing Date:

April 27, 2005

Export Citation:

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Assignee:

EBARA CORPORATION (11-1, Haneda Asahi-cho Ohta-k, Tokyo 10, 14485, JP)
Katsuoka, Seiji c/o Ebara Corporation (11-1 Haneda Asahi-cho, Ohta-k, Tokyo 10, 14485, JP)
Sekimoto, Masahiko c/o Ebara Corporation (11-1 Haneda Asahi-cho, Ohta-k, Tokyo 10, 14485, JP)
Watanabe, Teruyuki c/o Ebara Corporation (11-1 Haneda Asahi-cho, Ohta-k, Tokyo 10, 14485, JP)
Kato, Ryo c/o Ebara Corporation (11-1 Haneda Asahi-cho, Ohta-k, Tokyo 10, 14485, JP)
Yokoyama, Toshio c/o Ebara Corporation (11-1 Haneda Asahi-cho, Ohta-k, Tokyo 10, 14485, JP)
Suzuki, Kenichi c/o Ebara Corporation (11-1 Haneda Asahi-cho, Ohta-k, Tokyo 10, 14485, JP)
Kobayashi, Kenichi c/o Ebara Corporation (11-1 Haneda Asahi-cho, Ohta-k, Tokyo 10, 14485, JP)

International Classes:

B05B15/12; B05C3/09; B05C9/06; B05C11/10; B05C13/00; B05C15/00; B05D3/12; B65H1/00; C23C2/00; C23C18/16; C23C18/31; C25D17/06; H01L21/00; H01L21/288; H01L21/68; H01L21/683; H01L21/768; (IPC1-7): B05C9/06; B05B15/12; B05C3/09; B05C11/10; B05C15/00; C23C18/31; C25D17/06; H01L21/68

Attorney, Agent or Firm:

Watanabe, Isamu (GOWA Nishi-Shinjuku 4F, 5-8 Nishi-Shinjuku 7-chom, Shinjuku-ku Tokyo 23, 16000, JP)

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