SUBSTRATE PROCESSOR AND METHOD OF MANUFACTURING DEVICE

Title:

SUBSTRATE PROCESSOR AND METHOD OF MANUFACTURING DEVICE

Document Type and Number:

WIPO Patent Application WO/2004/079813

Kind Code:

A1

Abstract:

A substrate processor enables realization of a proper process by combining advantages of a remote plasma and a plasma generated in an entire processing chamber. The substrate processor includes a conductive member (10) which is installed surrounding a processing space (1) and grounded to the earth and a pair of electrodes (4) installed inside the conductive member (10). A primary coil of an insulating transformer (7) is connected to a high-frequency power supply unit (14) and a secondary coil is connected to the electrodes (4). A switch (13) is connected to the connection line connecting the secondary coil to the electrodes (4). By setting up/cutting off the connection of the line to the earth with use of the switch (13), the region where the plasma is generated in the processing space (1) can be changed.

Inventors:

Toyoda, Kazuyuki c/o Hitachi Kokusai Electric Inc. 3-14-20 (Hiagshi-nakano Nakano-k, Tokyo 11, 16485, JP)
Shima, Nobuhito c/o Hitachi Kokusai Electric Inc. 3-14-20 (Hiagshi-nakano Nakano-k, Tokyo 11, 16485, JP)
Ishimaru, Nobuo c/o Hitachi Kokusai Electric Inc. 3-14-20 (Hiagshi-nakano Nakano-k, Tokyo 11, 16485, JP)
Konno, Yoshikazu c/o Hitachi Kokusai Electric Inc. 3-14-20 (Hiagshi-nakano Nakano-k, Tokyo 11, 16485, JP)
Takebayashi, Motonari c/o Hitachi Kokusai Electric Inc. 3-14-20 (Hiagshi-nakano Nakano-k, Tokyo 11, 16485, JP)
Noda, Takaaki c/o Hitachi Kokusai Electric Inc. 3-14-20 (Hiagshi-nakano Nakano-k, Tokyo 11, 16485, JP)
Mizuno, Norikazu c/o Hitachi Kokusai Electric Inc. 3-14-20 (Hiagshi-nakano Nakano-k, Tokyo 11, 16485, JP)

Application Number:

PCT/JP2004/002735

Publication Date:

September 16, 2004

Filing Date:

March 04, 2004

Export Citation:

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Assignee:

HITACHI KOKUSAI ELECTRIC INC. (3-14-20, Higashi-nakano Nakano-k, Tokyo 11, 16485, JP)
Toyoda, Kazuyuki c/o Hitachi Kokusai Electric Inc. 3-14-20 (Hiagshi-nakano Nakano-k, Tokyo 11, 16485, JP)
Shima, Nobuhito c/o Hitachi Kokusai Electric Inc. 3-14-20 (Hiagshi-nakano Nakano-k, Tokyo 11, 16485, JP)
Ishimaru, Nobuo c/o Hitachi Kokusai Electric Inc. 3-14-20 (Hiagshi-nakano Nakano-k, Tokyo 11, 16485, JP)
Konno, Yoshikazu c/o Hitachi Kokusai Electric Inc. 3-14-20 (Hiagshi-nakano Nakano-k, Tokyo 11, 16485, JP)
Takebayashi, Motonari c/o Hitachi Kokusai Electric Inc. 3-14-20 (Hiagshi-nakano Nakano-k, Tokyo 11, 16485, JP)
Noda, Takaaki c/o Hitachi Kokusai Electric Inc. 3-14-20 (Hiagshi-nakano Nakano-k, Tokyo 11, 16485, JP)
Mizuno, Norikazu c/o Hitachi Kokusai Electric Inc. 3-14-20 (Hiagshi-nakano Nakano-k, Tokyo 11, 16485, JP)

International Classes:

C23C16/50; H01J37/32; H01L21/00; H01F19/08; (IPC1-7): H01L21/31; H01F27/00

Attorney, Agent or Firm:

Miyamoto, Haruhiko (Urbane Sagami Bldg. 602, 19-13 Sagami-ono 3-chome, Sagamihara-sh, Kanagawa 03, 22808, JP)

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