Title:
SUBSTRATE PROVIDED WITH REFLECTING LAYER FOR EUV LITHOGRAPHY, AND REFLECTIVE MASK BLANK FOR EUV LITHOGRAPHY
Document Type and Number:
WIPO Patent Application WO/2012/014904
Kind Code:
A1
Abstract:
Provided are an EUV mask blank wherein deterioration of reflectivity due to oxidation of a Ru protection layer is suppressed, a functional film-attached substrate to be used for the purpose of manufacturing the EUV mask blank, and a method for manufacturing the functional film-attached substrate.
The substrate provided with a reflecting layer for EUV lithography has the reflecting layer, which reflects EUV light, and a protection film, which protects the reflecting layer, in this order on a substrate. The substrate provided with the reflecting layer for EUV lithography is characterized in that: the reflecting layer is a Mo/Si multilayer reflecting film; the protection layer is a Ru layer or a Ru compound layer; an intermediate layer is formed between the reflecting layer and the protection layer, said intermediate layer being composed of a first layer containing 0.5-25 at% of nitrogen and 75-99.5 at% of Si, and a second layer containing 60-99.8 at% of Ru, and 0.1-10 at% of nitrogen, and 0.1-30 at% of Si, and having a total film thickness of the first layer and the second layer of 0.2-2.5 nm; the first layer constituting the intermediate layer is formed on the reflecting layer side; the second layer is formed on the first layer; and the protection layer substantially does not contain Si.
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Inventors:
MIKAMI, Masaki (Limited 12-1, Yurakucho 1-chome, Chiyoda-k, Tokyo 05, 〒1008405, JP)
三上 正樹 (〒05 東京都千代田区有楽町一丁目１２番１号 旭硝子株式会社内 Tokyo, 〒1008405, JP)
三上 正樹 (〒05 東京都千代田区有楽町一丁目１２番１号 旭硝子株式会社内 Tokyo, 〒1008405, JP)
Application Number:
JP2011/066993
Publication Date:
February 02, 2012
Filing Date:
July 26, 2011
Export Citation:
Assignee:
ASAHI GLASS COMPANY, LIMITED (5-1 Marunouchi 1-chome, Chiyoda-ku Tokyo, 05, 〒1008405, JP)
旭硝子株式会社 (〒05 東京都千代田区丸の内一丁目５番１号 Tokyo, 〒1008405, JP)
MIKAMI, Masaki (Limited 12-1, Yurakucho 1-chome, Chiyoda-k, Tokyo 05, 〒1008405, JP)
旭硝子株式会社 (〒05 東京都千代田区丸の内一丁目５番１号 Tokyo, 〒1008405, JP)
MIKAMI, Masaki (Limited 12-1, Yurakucho 1-chome, Chiyoda-k, Tokyo 05, 〒1008405, JP)
International Classes:
H01L21/027
Attorney, Agent or Firm:
SENMYO, Kenji et al. (4th Floor, SIA Kanda Square17, Kanda-konyach, Chiyoda-ku Tokyo 35, 〒1010035, JP)
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Claims:
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