Title:
SUBSTRATE STORAGE CONTAINER AND FILTER PART
Document Type and Number:
WIPO Patent Application WO/2022/168287
Kind Code:
A1
Abstract:
This substrate storage container comprises: a container body; a lid body; a sealing member; and a filter part 80 that has a ventilation passage enabling connection between a substrate storage space and a space outside the container body, a filter 85 disposed in the ventilation passage, and a housing 81, 82, 83, 84 for forming the ventilation passage, that is disposed in the container body, and that enables air passing between the space outside the container body and the substrate storage space through the filter 85. The filter part 80 includes, in the housing 81, 82, 83, 84, a filter part sealing member 862 that hermetically seals the ventilation passage with respect to the outside of the housing 81, 82, 83, 84, and a valve body 863 that can open/close the ventilation passage. The valve body 863 is supported by a hinge structure.
Inventors:
OYAMA TAKAHARU (JP)
Application Number:
PCT/JP2021/004426
Publication Date:
August 11, 2022
Filing Date:
February 05, 2021
Export Citation:
Assignee:
MIRAIAL CO LTD (JP)
International Classes:
F16K15/14; B65D81/20; B65D85/30; F16J15/10; F16K15/16; H01L21/673
Domestic Patent References:
| WO2015132910A1 | 2015-09-11 |
Foreign References:
| JPH0445237U | 1992-04-16 | |||
| JP2006204839A | 2006-08-10 | |||
| JPS50106723U | 1975-09-02 | |||
| JP2013221543A | 2013-10-28 | |||
| JP2016508196A | 2016-03-17 |
Attorney, Agent or Firm:
SHOBAYASHI Masayuki et al. (JP)
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