Title:
SUBSTRATE STORAGE CONTAINER AND GAS SUBSTITUTION UNIT
Document Type and Number:
WIPO Patent Application WO/2018/135222
Kind Code:
A1
Abstract:
Provided are a substrate storage container and a gas substitution unit with which variations in humidity or concentration of gas in a space over a substrate can be decreased. The substrate storage container is provided with: a container body which has an opening portion in a front surface and in which a plurality of substrates can be stored; a lid body for closing the opening portion; an air supply valve for supplying gas from the outside of the container body into an internal space thereof; and a gas substitution unit (3R) for blowing out the gas supplied from the air supply valve into the internal space of the container body. The air supply valve is mounted to the rear of a bottom surface of the container body. The gas substitution unit (3R) includes a housing member (31) and a cover member (32) covering an opening of the housing member (31). The housing member (31) includes a plurality of first blow-out holes (31a to 31z) disposed in an upper-lower direction for blowing out accumulated gas, wherein an uppermost-tier first blow-out hole (31a) has an opening area greater than an opening area of a second-tier first blow-out hole (31b).
Inventors:
OGAWA OSAMU (JP)
TOMINAGA KIMINORI (JP)
TOMINAGA KIMINORI (JP)
Application Number:
PCT/JP2017/045724
Publication Date:
July 26, 2018
Filing Date:
December 20, 2017
Export Citation:
Assignee:
SHINETSU POLYMER CO (JP)
International Classes:
H01L21/673; B65D85/86
Foreign References:
| JP2015176976A | 2015-10-05 | |||
| JP2016225352A | 2016-12-28 | |||
| JP2016004949A | 2016-01-12 | |||
| JP2011187884A | 2011-09-22 | |||
| JPH09330884A | 1997-12-22 |
Attorney, Agent or Firm:
SAKAMOTO Tomohiro (JP)
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