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Patent Searching and Data


Title:
SUBSTRATE STORAGE CONTAINER
Document Type and Number:
WIPO Patent Application WO/2013/005740
Kind Code:
A1
Abstract:
Provided is a substrate container that eliminates damage to substrates, a cover body, and locking mechanisms; stabilizes the locking operation of the locking mechanisms in order to ensure that the cover body is sufficiently drawn inward; facilitates the assembling speed of the locking mechanisms; and prevents the locking mechanisms from being released due to disengagement of rotational manipulation bodies from locking bars. This substrate storage container is provided with: a container main body for storing semiconductor wafers; a cover body (10) to be fitted to the front side of the container main body; and a locking mechanism (40) for locking the cover body (10). The locking mechanism (40) comprises: a rotational manipulation body (41) that is supported on the cover body (10) and manipulated from the cover plate (30) side; and locking bars (64) that slide in the vertical direction as the rotational manipulation body (41) is rotated such that the apical sections (65) thereof engage with/disengage from locking holes created on the container main body. The rotational manipulation body (41) is divided into first and second rotational manipulation bodies (42)/(42A); first and second cam sections (51)/(60) which form cams are formed on the first and second rotational manipulation bodies (42)/(42A); and the first and second cam sections (51)/(60) are caused to sandwich end sections of the locking bars (64) that oscillate in the thickness direction of the cover body (10).

Inventors:
NAGASHIMA TSUYOSHI (JP)
INOUE SHUICHI (JP)
OYAMA TAKAHARU (JP)
MATSUTORI CHIAKI (JP)
OHNUKI KAZUMASA (JP)
SHIDA HIROYUKI (JP)
YAMAGISHI HIROKI (JP)
Application Number:
PCT/JP2012/066989
Publication Date:
January 10, 2013
Filing Date:
July 03, 2012
Export Citation:
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Assignee:
MIRAIAL CO LTD (JP)
SHINETSU POLYMER CO (JP)
NAGASHIMA TSUYOSHI (JP)
INOUE SHUICHI (JP)
OYAMA TAKAHARU (JP)
MATSUTORI CHIAKI (JP)
OHNUKI KAZUMASA (JP)
SHIDA HIROYUKI (JP)
YAMAGISHI HIROKI (JP)
International Classes:
H01L21/673; B65D43/02; B65D85/86
Domestic Patent References:
WO2003010069A12003-02-06
Foreign References:
JPH08191100A1996-07-23
JP2005101518A2005-04-14
JP2007019328A2007-01-25
JP2001512288A2001-08-21
JP2008098236A2008-04-24
JP2007191205A2007-08-02
JP2010010598A2010-01-14
Attorney, Agent or Firm:
FUJIMOTO Eisuke et al. (JP)
Eisuke Fujimoto (JP)
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Claims: