Title:
SUBSTRATE STORAGE CONTAINER
Document Type and Number:
WIPO Patent Application WO/2022/118491
Kind Code:
A1
Abstract:
Provided is a substrate storage container provided with a valve body that improves assembly workability. This substrate storage container comprises a valve body 40 that controls the flow of a gas to a container body 10. The valve body 40 comprises: a first path 458 that communicates with the outside; an elastic valve body 45 that has a valve opening 454 that allows communication with a second path 459 that communicates with the inside; a retention member 41 that retains the elastic valve body 45; and a fastening cap 47 that, by being inserted into the elastic valve body 45, fixes the elastic valve body 45 to the retention member 41. The valve opening 454 is closed by adhesion resulting from the elastic force of the elastic valve body 45.
Inventors:
OGAWA OSAMU (JP)
Application Number:
PCT/JP2021/024654
Publication Date:
June 09, 2022
Filing Date:
June 30, 2021
Export Citation:
Assignee:
SHINETSU POLYMER CO (JP)
International Classes:
F16K15/14; B65D85/86; H01L21/673
Foreign References:
| JP2019021736A | 2019-02-07 | |||
| JP2016503586A | 2016-02-04 | |||
| JP2018505546A | 2018-02-22 | |||
| JP2019021735A | 2019-02-07 |
Attorney, Agent or Firm:
SAKAMOTO & PARTNERS (JP)
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