SUBSTRATE STORAGE PROCESSING DEVICE, SUBSTRATE STORAGE PROCESSING METHOD, AND RECORDING MEDIUM

WIPO Patent Application WO/2018/155312

A1

Provided are a substrate storage processing device, a substrate storage processing method, and a recording medium for making it possible to confirm whether a lid is appropriately attached in a cassette for storing a substrate. The substrate storage processing device is provided with: a stage for placing a cassette having a lid detachably mounted with respect to an opening portion; a lid attach/detach mechanism for attaching or detaching the lid with respect to the opening portion of the cassette placed on the stage, the lid attach/detach mechanism being movable to an attaching position for contacting the lid disposed at the position of the opening portion, and a withdrawn position for not contacting the lid disposed at the position of the opening portion; a lid holding sensor unit for sensing whether the lid is being held by the lid attach/detach mechanism; and a control unit for determining the presence or absence of anomaly regarding the attachment or detachment of the lid on the basis of the result of sensing by the lid holding sensor unit.

MATSUMOTO AKIHIRO (JP)
MATSUSHITA MICHIAKI (JP)
MURATA AKIRA (JP)
TASHIRO MINORU (JP)

PCT/JP2018/005346

August 30, 2018

February 15, 2018

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TOKYO ELECTRON LTD (JP)

H01L21/677; B65G49/00; H01L21/027

JP2001077177A	2001-03-23
JP2014138011A	2014-07-28
JP2015026806A	2015-02-05
JPH11354622A	1999-12-24
JP2010010396A	2010-01-14
JP2010153843A	2010-07-08

NAGAI Hiroshi et al. (JP)

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