Title:
SUBSTRATE STORAGE RECEPTACLE
Document Type and Number:
WIPO Patent Application WO/2014/136247
Kind Code:
A1
Abstract:
A substrate storage receptacle is provided with a receptacle main unit, a lid, side substrate support portions, a lid-side substrate support portion, and an end-side substrate support portion. The lid-side substrate support portion and/or the end-side substrate support portion has a slope-facing surface (601 or 731) which can face a front face (W11) of the substrate (W) in a positional relationship intersecting the front face (W11) of the substrate (W), and an abutting surface (602 or 732) which can abut an edge of a rear face (W21) of the substrate (W). When an angle formed by either face (W11) of the front face (W11) or the rear face (W22) of the substrate (W) and the slope-facing surface (601 or 731) is a, and an angle formed by the one face (W11) of the substrate (W) and the abutting surface (602 or 732) is b, a and b have the relationship of a > b.
Inventors:
HORIBATA RYOSUKE (JP)
NISHIZAKA KOUICHI (JP)
OYAMA TAKAHARU (JP)
TOMITA MINORU (JP)
INOUE TADATOSHI (JP)
NISHIZAKA KOUICHI (JP)
OYAMA TAKAHARU (JP)
TOMITA MINORU (JP)
INOUE TADATOSHI (JP)
Application Number:
PCT/JP2013/056376
Publication Date:
September 12, 2014
Filing Date:
March 07, 2013
Export Citation:
Assignee:
MIRAIAL CO LTD (JP)
International Classes:
H01L21/673
Domestic Patent References:
| WO2010131291A1 | 2010-11-18 |
Foreign References:
| JP2010199189A | 2010-09-09 | |||
| JP2007145397A | 2007-06-14 | |||
| JP2005005525A | 2005-01-06 |
Attorney, Agent or Firm:
SHOBAYASHI, Masayuki et al. (JP)
Right wood Masayuki (JP)
Right wood Masayuki (JP)
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