Title:
SUBSTRATE STORING APPARATUS
Document Type and Number:
WIPO Patent Application WO/2007/043207
Kind Code:
A1
Abstract:
A substrate storing apparatus (10) is provided by stacking a plurality of storing
bodies (20) on an upper plane of a rigid plate (15). The storing body (20) is provided
with a buffer material section (21) having elasticity and quasi-conductivity,
and a load receiving section (22) composed of a frame-like body. On an upper plane
of the buffer material section (21), a cellulose substrate protecting layer
(23) is arranged. The substrate storing apparatus (10) stores substrates (S)
inside by stacking the storing bodies (20) whereupon the substrates (S) are placed,
and when the storing bodies (20) are stacked, the load receiving section (22)
permits the load of the entire storing bodies (20) to operate to an outer circumference
of the storing body (20) on a lower side, and the load is not operated to a center
portion whereupon the substrates (S) are placed. Even when a plurality of storing
bodies (20) are stacked, the substrates (S) stored in the storing bodies (20),
respectively, are not affected. Thus, the multitudes of storing bodies (20)
can be stacked, and the multitudes of substrates (S) can be carried at the same
time.
Inventors:
YOSHIZAWA, Takenori (())
Application Number:
JP2006/308577
Publication Date:
April 19, 2007
Filing Date:
April 24, 2006
Export Citation:
Assignee:
SHARP KABUSHIKI KAISHA (22-22, Nagaike-cho Abeno-ku, Osaka-sh, Osaka 22, 5458522, JP)
シャープ株式会社 (〒22 大阪府大阪市阿倍野区長池町２２番２２号 Osaka, 5458522, JP)
シャープ株式会社 (〒22 大阪府大阪市阿倍野区長池町２２番２２号 Osaka, 5458522, JP)
International Classes:
B65D85/86; B65G57/00; H01L21/673
Attorney, Agent or Firm:
GORO, Kazuo et al. (AKATSUKI UNION PATENT FIRM, Midori Nagoya Bldg. 8th Floor 22-4, Meieki 3-chome, Nakamura-k, Nagoya-shi Aichi, 450-0002, JP)
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