Title:
SUBSTRATE STORING DEVICE
Document Type and Number:
WIPO Patent Application WO/2011/108215
Kind Code:
A1
Abstract:
Foreign substances are effectively prevented from attaching to a stored substrate in accordance with the usage environment. Disclosed is a substrate storing device (100) which is provided with an air supplying section (110) for introducing outside air into the substrate storing device (100), an exhaust section (120) disposed opposite the air supplying section, a substrate mounting plate (140) which is disposed between the air supplying section and the exhaust section and which has a communication hole (142) for connecting the air supplying section and the exhaust section, an air supplying filter (112) disposed on the air supplying section, and a fan (122) which is disposed on the air supplying section or the exhaust section, wherein a mounting hole (150) is detachably attached with at least one or a combination of two or more of the following: a state sensor which detects the state within the substrate storing device (100), a particle charging unit, and a temperature control unit (figure 2).
Inventors:
MORIYA TSUYOSHI (JP)
Application Number:
PCT/JP2011/000942
Publication Date:
September 09, 2011
Filing Date:
February 21, 2011
Export Citation:
Assignee:
TOKYO ELECTRON LTD (JP)
MORIYA TSUYOSHI (JP)
MORIYA TSUYOSHI (JP)
International Classes:
H01L21/673; B65D77/04; B65D81/20; B65D85/86; G03F1/66
Foreign References:
| JPS6411945U | 1989-01-23 | |||
| JP2001053136A | 2001-02-23 | |||
| JPS55134239A | 1980-10-18 | |||
| JP2004047929A | 2004-02-12 | |||
| JPH047855A | 1992-01-13 | |||
| JP2005274181A | 2005-10-06 | |||
| JP2002122382A | 2002-04-26 | |||
| JPS63503259A | 1988-11-24 | |||
| JP2001330620A | 2001-11-30 | |||
| JP2002176097A | 2002-06-21 | |||
| JP2005324913A | 2005-11-24 |
Attorney, Agent or Firm:
OHYAMA, HIROAKI (JP)
Hiroaki Oyama (JP)
Hiroaki Oyama (JP)
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Claims: