SUBSTRATE SUPPORT DEVICE, EXPOSURE DEVICE, AND PATTERNING DEVICE

WIPO Patent Application WO/2017/199658

A1

This invention is provided with: a cylindrical body (50), which is a rotating drum (DR) for winding a part of a long flexible sheet substrate (P) around the circumferential direction of the cylindrical outer circumferential surface thereof and supporting the part of the sheet substrate (P), the cylindrical body (50) having a cylindrical outer circumferential surface having a given radius from the center axis (AXo); photoelectric sensors (PD1-3) for outputting a signal corresponding to the strength of a beam (LBn) which is projected towards the outer circumferential surface of the cylindrical body (50) and which enters an opening (501) formed on a part of the outer circumferential surface of the cylindrical body (50); and a sensor circuit substrate (60), the signal from the photoelectric sensors (PD1-3) being inputted into the sensor circuit substrate (60) and the sensor circuit substrate (60) performing signal processing for measuring the beam position or a change in the intensity of the beam (LBn).

KATO MASAKI (JP)
KITO YOSHIAKI (JP)
HORI MASAKAZU (JP)
KIUCHI TOHRU (JP)
KURASHIGE TAKAHIRO (JP)

PCT/JP2017/015416

November 23, 2017

April 17, 2017

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NIKON CORP (JP)

G03F7/24; G03F7/20; H01L21/68

WO2015060972A1

2015-04-30

JP2015064461A	2015-04-09
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JP2009037026A	2009-02-19
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JP2016072132A	2016-05-09
JP2016029484A	2016-03-03
JP2014010296A	2014-01-20
JP2014081452A	2014-05-08
JP2014000702A	2014-01-09

CHIBA Yoshihiro et al. (JP)

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