Title:
SUBSTRATE SUPPORTING DEVICE
Document Type and Number:
WIPO Patent Application WO/2017/154435
Kind Code:
A1
Abstract:
Provided is a substrate supporting device having a power supply structure capable of excellently supplying power to each of a large number of electrodes.
A ceramic heater 100 is provided with: a base material 10 having, as an upper surface, a supporting surface for supporting a substrate; electrodes 20 embedded in the base material 10; a base material supporting member 30, which is attached to the lower surface of the base material 10, and which is formed of a heat insulating material; and power supply rods 40, each of which is formed in a peripheral wall 34 of the base material supporting member 30, passes through one through hole 35 penetrating in the vertical direction, and is electrically connected to each of the electrodes 20.
Inventors:
TOKUSHO NORIAKI (JP)
SASAKI SHUNICHI (JP)
ISHINO TOMOHIRO (JP)
AOYAMA HISANORI (JP)
HINO MAKOTO (JP)
FUKAZAWA KENICHI (JP)
TSUCHIDA ATSUSHI (JP)
UMEKI TOSHIYA (JP)
SASAKI SHUNICHI (JP)
ISHINO TOMOHIRO (JP)
AOYAMA HISANORI (JP)
HINO MAKOTO (JP)
FUKAZAWA KENICHI (JP)
TSUCHIDA ATSUSHI (JP)
UMEKI TOSHIYA (JP)
Application Number:
PCT/JP2017/004138
Publication Date:
September 14, 2017
Filing Date:
February 06, 2017
Export Citation:
Assignee:
NGK SPARK PLUG CO (JP)
International Classes:
H01L21/683; H01L21/02; H05B3/02; H05B3/20
Foreign References:
| JP2011165891A | 2011-08-25 | |||
| JP2007258115A | 2007-10-04 | |||
| JP2015220368A | 2015-12-07 | |||
| JPH1168420A | 1999-03-09 |
Attorney, Agent or Firm:
AOKI Noboru et al. (JP)
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