Title:
SUBSTRATE SUSCEPTOR AND DEPOSITION APPARATUS HAVING SAME
Document Type and Number:
WIPO Patent Application WO/2012/015140
Kind Code:
A1
Abstract:
The present invention relates to a deposition apparatus used to manufacture a semiconductor device. The deposition apparatus according to the present invention comprises: a process chamber; a substrate susceptor installed in the process chamber and including a plurality of concentrically arranged stages on which substrates are positioned; a plurality of members for supplying reaction gas; a member for supplying purge gas; a spray member including a plurality of baffles for independently spraying reaction gas and purge gas, supplied from the plurality of members supplying reaction gas and the member supplying purge gas, on the entirety of the treating surfaces of the substrate, in positions corresponding respectively to the substrates positioned on the stages; and a driving unit for rotating the substrate susceptor or the spray member in order for the baffles of the spray member to sequentially revolve each of the plurality of substrates positioned on the stages. The substrate susceptor comprises: an upper susceptor on which the stages are formed; a lower susceptor coupled to the bottom surface of the upper susceptor and including a heating element installed thereon for providing a heat source for heating the substrates; and barrier plates installed to respectively correspond to the stages on the bottom surface of the lower susceptor, for raising thermal efficiency by re-supplying thermal energy radiated toward the lower susceptor bottom surface to the lower susceptor.
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Inventors:
PARK, Yong Sung (4-2 Chaam-dong, Cheonan-si, Chungcheongnam-do 330-200, 330-200, KR)
박용성 (충청남도 천안시 차암동 4-2, 330-200 Chungcheongnam-do, 330-200, KR)
LEE, Sung Kwang (4-2 Chaam-dong, Cheonan-si, Chungcheongnam-do 330-200, 330-200, KR)
박용성 (충청남도 천안시 차암동 4-2, 330-200 Chungcheongnam-do, 330-200, KR)
LEE, Sung Kwang (4-2 Chaam-dong, Cheonan-si, Chungcheongnam-do 330-200, 330-200, KR)
Application Number:
KR2011/001819
Publication Date:
February 02, 2012
Filing Date:
March 16, 2011
Export Citation:
Assignee:
KOOKJE ELECTRIC KOREA CO., LTD. (4-2 Chaam-dong, Cheonan-si, Chungcheongnam-do 330-200, 330-200, KR)
국제엘렉트릭코리아 주식회사 (충청남도 천안시 차암동 4-2, 330-200 Chungcheongnam-do, 330-200, KR)
PARK, Yong Sung (4-2 Chaam-dong, Cheonan-si, Chungcheongnam-do 330-200, 330-200, KR)
박용성 (충청남도 천안시 차암동 4-2, 330-200 Chungcheongnam-do, 330-200, KR)
국제엘렉트릭코리아 주식회사 (충청남도 천안시 차암동 4-2, 330-200 Chungcheongnam-do, 330-200, KR)
PARK, Yong Sung (4-2 Chaam-dong, Cheonan-si, Chungcheongnam-do 330-200, 330-200, KR)
박용성 (충청남도 천안시 차암동 4-2, 330-200 Chungcheongnam-do, 330-200, KR)
International Classes:
H01L21/205; H01L21/683
Attorney, Agent or Firm:
KWON, Hyuk-Soo et al. (3rd Fl, 827-25 Yeoksam-dong, Kangnam-ku, Seoul 135-080, 135-080, KR)
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