Title:
SUBSTRATE TRANSFER APPARATUS AND SUBSTRATE PROCESSING APPARATUS
Document Type and Number:
WIPO Patent Application WO/2013/035696
Kind Code:
A1
Abstract:
This substrate transfer apparatus is provided with: a transfer unit, which transfers a strip-shaped substrate having a circuit pattern formed thereon, said circuit pattern including repeated pattern portions at a predetermined cycle; a position detector which outputs, during a time when the substrate is being transferred by means of the transfer unit, detection signals at least at two areas in the direction that intersects the transfer direction of the substrate, said detection signals corresponding to the repeated pattern portions in the circuit pattern; a calculating apparatus, which calculates, on the basis of detection results obtained from the position detector, information relating to deformation and/or positional shift of the substrate; and a control system for correction, which corrects the deformation and/or positional shift of the substrate on the basis of results calculated by means of the calculating apparatus.
Inventors:
KIUCHI TOHRU (JP)
KATO MASAKI (JP)
KATO MASAKI (JP)
Application Number:
PCT/JP2012/072466
Publication Date:
March 14, 2013
Filing Date:
September 04, 2012
Export Citation:
Assignee:
NIKON CORP (JP)
KIUCHI TOHRU (JP)
KATO MASAKI (JP)
KIUCHI TOHRU (JP)
KATO MASAKI (JP)
International Classes:
G03F7/20; H01L21/027; H01L21/677; H01L21/68
Foreign References:
| JP2010014939A | 2010-01-21 | |||
| JP2006292919A | 2006-10-26 | |||
| JP2006178463A | 2006-07-06 | |||
| JP2009237321A | 2009-10-15 | |||
| JP2010271603A | 2010-12-02 | |||
| JP2011070868A | 2011-04-07 |
Attorney, Agent or Firm:
SHIGA Masatake et al. (JP)
Masatake Shiga (JP)
Masatake Shiga (JP)
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Claims:
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