Title:
SUBSTRATE TRANSFER APPARATUS
Document Type and Number:
WIPO Patent Application WO/2023/032571
Kind Code:
A1
Abstract:
This substrate transfer apparatus (10) comprises a rod member (15) that operates so as to rotate about a rotation axis A1, a holder-side turning member (12) linked to a holder (11) for holding a substrate S, a holder-side support member (13) for supporting the holder-side turning member (12) in a state in which the holder-side turning member (12) is allowed to move linearly in a prescribed direction, a linear-motion-side turning member (22) having a linear-motion part (21) that moves linearly in one direction, and a linear-motion-side support member (23) that supports the linear-motion-side turning member (22) in a state in which the linear-motion-side turning member (22) is allowed to move linearly in a prescribed direction. The holder-side support member (13) operates so as to rotate about the rotation axis A1 integrally with the linear-motion-side support member (23), and at the same time, the linear-motion-side turning member (22) moves linearly relative to the linear-motion-side support member (23) in tandem with the linear-motion part (21) moving linearly in a first direction D1, and the holder-side turning member (12) moves linearly relative to the holder-side support member (13) via the rod member (15), whereby the holder (11) moves on one line.
Inventors:
ONODA MASATOSHI (JP)
TAKASHIMA DAIKI (JP)
TAKASHIMA DAIKI (JP)
Application Number:
PCT/JP2022/029754
Publication Date:
March 09, 2023
Filing Date:
August 03, 2022
Export Citation:
Assignee:
NISSIN ION EQUIPMENT CO LTD (JP)
International Classes:
B25J5/02; F16H19/04; F16H25/22; H01J37/20; H01J37/317
Foreign References:
| JP2009146865A | 2009-07-02 | |||
| JPH10135146A | 1998-05-22 | |||
| KR20200115914A | 2020-10-08 | |||
| US20140367587A1 | 2014-12-18 | |||
| CN211788912U | 2020-10-27 |
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