SUBSTRATE TRANSFER HAND

WIPO Patent Application WO/2017/131148

A1

[Problem] To provide a substrate-transfer hand capable of reducing the number of points where contact is made with a substrate, and supporting the substrate in a high-rigidity state. [Solution] The present invention includes a vertical hand support 20a extending in the vertical direction, and a plurality of horizontal hand supports 31a, 32a connected to the vertical hand support 20a and extending in the direction intersecting the direction in which the vertical hand support 20a extends. The plurality of horizontal hand supports 31a, 32a include a plurality of first horizontal supports 31a and a plurality of second horizontal hand supports 32a. Each of the first horizontal hand supports 31a has a plurality of first contacts 40A that can contact the substrate SB, said contacts 40A being aligned in the direction in which the first horizontal supports 31a extend, and the maximum height position of the first contact points 40A is a first height. Each of the second horizontal hand support parts 32a respectively has a plurality of second contacts 40B that can contact the substrate SB, said second contacts 40B being aligned in the direction in which the second horizontal hand supports 32a extend, and the maximum height of the second contact points 40B is a second height that is lower than the first height.

OKAMOTO KENTARO (JP)

PCT/JP2017/002909

August 03, 2017

January 27, 2017

Click for automatic bibliography generation  

DAIHEN CORP (JP)

H01L21/677; B25J15/00; B65G49/06

WO2004113205A1

2004-12-29

JP2003243482A	2003-08-29
JP2007008700A	2007-01-18
JP2009141091A	2009-06-25
JP2005223204A	2005-08-18
JP2001179672A	2001-07-03

YOSHIDA Minoru et al. (JP)

View/Download PDF      PDF Help

Previous Patent: METHOD FOR PRODUCING COATED NICKEL-BASED LITHIUM-NICKEL COMPOSITE OXIDE PARTICLES

Next Patent: TETRAHYDRONAPHTHALENE DERIVATIVE